| Patent Number |
Title Of Patent |
Date Issued |
| 7549143 |
Method and device for checking lithography data |
June 16, 2009 |
| Devices and methods are provided that include advantages such as the ability to identify sizes, shapes and locations of frequently unwanted additional features that occur as a result of photolithographic interference. The additional feature information is obtained through use of simu |
| 7549142 |
Method and device for checking lithography data |
June 16, 2009 |
| Devices and methods are provided that include advantages such as the ability to identify sizes, shapes and locations of frequently unwanted additional features that occur as a result of photolithographic interference. The additional feature information is obtained through use of simu |
| 7276315 |
Methods for generating or designing sidelobe inhibitors for radiation patterning tools |
October 2, 2007 |
| Design methods and a computer-readable medium having computer-executable instructions thereon for sidelobe suppression in a radiation-patterning tool or mask. Sidelobe artifacts are mitigated by identifying elements as a function of the radiation wavelength for forming desired profiles o |
| 7273684 |
Mask having transmissive elements and a common sidelobe inhibitor for sidelobe suppression in ra |
September 25, 2007 |
| A mask having transmissive elements and one or more sidelobe inhibitors for sidelobe suppression during a radiation-patterning process is provided. Sidelobe artifacts are mitigated by identifying elements as a function of the radiation wavelength for forming desired profiles on a sem |
| 7096452 |
Method and device for checking lithography data |
August 22, 2006 |
| Devices and methods are provided that include advantages such as the ability to identify sizes, shapes and locations of frequently unwanted additional features that occur as a result of photolithographic interference. The additional feature information is obtained through use of simu |
