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Inventor: Alexander; Jim
Address: Tempe, AZ
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6696367 |
System for the improved handling of wafers within a process tool |
February 24, 2004 |
| A substrate fabrication system is provided which includes a buffer station located inline between a front docking port and a loadlock chamber, the buffer station being operatively joined with a front handling chamber. Preferred embodiments employ a buffer station having a rack with reduc |
| 6068441 |
Substrate transfer system for semiconductor processing equipment |
May 30, 2000 |
| A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either |
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