| Patent Number |
Title Of Patent |
Date Issued |
| 7168911 |
Semiconductor handling robot with improved paddle-type end effector |
January 30, 2007 |
| A robotic semiconductor handling system includes two robot arms for transferring substrates between processing, cooling, and storage stations. The first robot arm has a paddle-type end effector adapted such that it can support one substrate at a primary location as well as a second s |
| 6585478 |
Semiconductor handling robot with improved paddle-type end effector |
July 1, 2003 |
| A robotic semiconductor handling system includes two robot arms for transferring substrates between processing, cooling, and storage stations. The first robot arm has a paddle-type end effector adapted such that it can support one substrate at a primary location as well as a second s |
| 6293749 |
Substrate transfer system for semiconductor processing equipment |
September 25, 2001 |
| A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either |
