| Patent Number |
Title Of Patent |
Date Issued |
| 5482604 |
Off-axis radio frequency diode apparatus for sputter deposition of RLG mirrors |
January 9, 1996 |
| A device for depositing a high quality thin film of material upon a surface is disclosed. The device is particularly adaptable to the construction of mirrors since it allows for coating of alternating layers of material. The quality of the film deposited is greatly improved by placing th |
| 5475231 |
Apparatus for monitoring ion beams with an electrically isolated aperture |
December 12, 1995 |
| An apparatus for monitoring ion beams with an electrically isolated aperture includes an ion beam source for generating an ion beam and an electrically conductive aperture plate arranged to collimate the ion beam. The aperture plate is electrically isolated from the rest of the depos |
| 5308461 |
Method to deposit multilayer films |
May 3, 1994 |
| The present invention discloses a method to deposit thin films on a substrate. An inert gas is introduced into a radio-frequency excited ion beam gun. The ions thus produced are directed to a target where molecules of the target are sputtered off and deposited on a substrate. A method of |
| 5240583 |
Apparatus to deposit multilayer films |
August 31, 1993 |
| The present invention discloses an apparatus to deposit thin films on a substrate. An ion beam produced by an ion gun, which is radio-frequency excited, impinges upon a target. The target is translatable laterally by a target holder to bring different target materials into contact with t |
| 5216330 |
Ion beam gun |
June 1, 1993 |
| The present invention discloses an ion beam gun wherein the ions are produced by radio-frequency excitation. A plasma is created in a vessel, or chamber, by ionizing gas molecules by means of a coil about the outside of the vessel. The coil receives radio-frequency energy which ionizes t |
| 5056920 |
Low cost ring laser angular rate sensor including thin fiber glass bonding of components to a la |
October 15, 1991 |
| A ring laser angular rate sensor is constructed from a solid block with mirror assemblies joined to the block a by thermally formed and gas tight seal comprised of a thin film of glass. |
| 4865451 |
Silicon substrate mirror assembly for lasers |
September 12, 1989 |
| Discloses a mirror chip and mirror assembly for ring laser angular rate sensors. A mirror assembly utilizes a silicon substrate upon which is deposited in mirror material. The silicon substrate is then affixed to a second substrate by a thermally sealable bonding agent. |
| 4865436 |
Low cost ring laser angular rate sensor |
September 12, 1989 |
| A ring laser angular rate sensor is constructed from a solid block with mirror assemblies joined to the block a by thermally formed and gas tight seal comprised of a thin film of glass. |
