| |
|
Inventor: Abe; Takao
Address: Yokohama, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6656540 |
Method for forming metallic film and apparatus for forming the same |
December 2, 2003 |
| The present invention provides methods and apparatus for the formation of a thin noble metal film which can achieve a high rate of film growth, can use inexpensive raw materials, and do not allow any impurities to remain in the thin film. Specifically, the present invention relates to a |
|
|
|