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Inventor:
Abe; Takao
Address:
Yokohama, JP
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
6656540 Method for forming metallic film and apparatus for forming the same December 2, 2003
The present invention provides methods and apparatus for the formation of a thin noble metal film which can achieve a high rate of film growth, can use inexpensive raw materials, and do not allow any impurities to remain in the thin film. Specifically, the present invention relates to a


 
 
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