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Inventor: Abe; Sho
Address: Kawasaki, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7598017 |
Negative resist composition and method of forming resist pattern |
October 6, 2009 |
| A negative resist composition including: a fluorine-containing resin component (F) containing a structural unit (f1) represented by a general formula (f1-0) shown below, and a structural unit (f2) having an alkali-soluble group, an alkali-soluble resin component (A) excluding the f |
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