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Inventor:
Abe; Sho
Address:
Kawasaki, JP
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
7598017 Negative resist composition and method of forming resist pattern October 6, 2009
A negative resist composition including: a fluorine-containing resin component (F) containing a structural unit (f1) represented by a general formula (f1-0) shown below, and a structural unit (f2) having an alkali-soluble group, an alkali-soluble resin component (A) excluding the f


 
 
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