Resources Contact Us Home Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE     Inventor: Abe; Masahito Address: Fujishawa, JP No. of patents: 1 Patents: Patent Number Title Of Patent Date Issued 6312569 Chemical vapor deposition apparatus and cleaning method thereof November 6, 2001 A chemical vapor deposition apparatus for depositing a thin film of highly dielectric materials for giga-capacity memory devices can reliably clean reaction products formed within the deposition chamber without sacrificing the production efficiency. The apparatus comprises a hermetic dep       Recently Added Patents Fast search GPS receiver Asynchronous data reception without precision timing reference Inter-carrier short messaging service providing phone number only experience Device including piezoelectric thin film and a support having a vertical cross-section with a curvature Fixing mechanism for a container in a vehicle air conditioning device Pulmonary nodule detection in a chest radiograph Nano-structured polymers for use as implants   Randomly Featured Patents High pressure fluid connector Plumbing fixture Thermally isolated calibration apparatus Method and apparatus of producing partial-area mask data files Offset rail grinding Method for automatically initiating a calling card telephone call Guide rail supported seam ironing apparatus Head gimbal assembly including a one-piece structural suspension and an accessory plate, and method of manufacturing the same Oral-administration forms of a medicament containing pantoprazol Process for forming a coating on a substrate using a silsesquioxane resin © 2006. PatentGenius. All Rights Reserved.