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Inventor: Abe; Masahiro
Address: Kanagawa-ken, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5993639 |
Method for producing electrolytic ionic water and an apparatus for the same |
November 30, 1999 |
| An electrolytic ionic water generating apparatus that produces electrolytic ionic water having a desired pH value and a semiconductor manufacturing apparatus that uses the electrolytic ionic water. The invention includes an electrolytic tank with an anode chamber and a cathode chamber, a |
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