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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Abe; Kazuhide
Address:
Kawasaki-shi, JP
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
7567018 Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical swi July 28, 2009
A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first fixing part on a substrate to a first operating end, and a second piezoelectric actuator co


 
 
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