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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Abe; Kazuhide
Address:
Kanagawa-Ken, JP
No. of patents:
9
Patents:












Patent Number Title Of Patent Date Issued
8038890 Piezoelectric-driven MEMS device and method for manufacturing the same October 18, 2011
A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the reces
7675222 Thin film piezoelectric actuator March 9, 2010
A thin film piezoelectric actuator comprises a driving part at least one end of which is supported by an anchor portion. The driving part includes: a piezoelectric film, a first lower electrode provided under a first region of the piezoelectric film, a second lower electrode provided
7459833 Thin film piezoelectric actuator December 2, 2008
A thin film piezoelectric actuator comprises a driving part at least one end of which is supported by an anchor portion. The driving part includes: a piezoelectric film, a first lower electrode provided under a first region of the piezoelectric film, a second lower electrode provided
7459827 Piezoelectric-driven MEMS device and method for manufacturing the same December 2, 2008
A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the reces
7135940 Tunable filter and portable telephone November 14, 2006
A tunable filter has a plurality of variable capacitors and a plurality of inductor elements, each being formed on a common substrate, a filter circuit formed by using at least a portion of the plurality of variable capacitors and a portion of the plurality of inductor elements, a monito
6870446 High frequency filter March 22, 2005
A high frequency filter comprises thin film piezoelectric resonators connected in series between the input/output nodes, thin film piezoelectric resonators connected in parallel between the input/output nodes and a variable voltage circuit adapted to change the voltage applied to at
6809604 Voltage control oscillator having a ferroelectric thin film perovskite single crystal resonator October 26, 2004
To provide a miniaturized voltage controlled oscillator which can oscillate simultaneously a plurality of frequencies and has high stability of frequency, an excellent low phase noise, small variation per hour, and a wide frequency variable range.A thin film bulk acoustic wave resonator
6797957 Infrared detection element and infrared detector September 28, 2004
An infrared detection element having a single-crystalline base layer 3 with a thickness of 50 nm to 10 .mu.m having a principal surface, a first electrode layer 4 formed on the principal surface of the single-crystalline base layer 3, a ferroelectric layer 5 which is formed on the fi
5760432 Thin film strained layer ferroelectric capacitors June 2, 1998
A capacitor having a first electrode and a dielectric material epitaxially deposited on a surface of the electrode to form a dielectric layer on the electrode. The dielectric material forming the dielectric layer has induced strain in the layer sufficient to significantly improve the










 
 
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