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Inventor: Abe; Katsuo
Address: Kanagawa, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 4724060 |
Sputtering apparatus with film forming directivity |
February 9, 1988 |
| A target for use in a sputtering technique usually has a flat structure. The present invention has succeeded in endowing sputtering film formation with a directivity in such a way that the surface of the target is provided with recesses thereby to limit the flight directions of sputt |
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