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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Abe; Katsuo
Address:
Kanagawa, JP
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
4724060 Sputtering apparatus with film forming directivity February 9, 1988
A target for use in a sputtering technique usually has a flat structure. The present invention has succeeded in endowing sputtering film formation with a directivity in such a way that the surface of the target is provided with recesses thereby to limit the flight directions of sputt


 
 
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