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Inventor: Abdallah; David J.
Address: Bernardsville, NJ
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7553905 |
Anti-reflective coatings |
June 30, 2009 |
| Novel self-crosslinking polymers are provided and which are useful in antireflective coatings to reduce outgassing. |
| 7416834 |
Antireflective coating compositions |
August 26, 2008 |
| The present invention relates to a spin-on antireflective coating composition for a photoresist comprising a polymer, a crosslinking compound and a thermal acid generator, where the polymer comprises at least one functional moiety capable of increasing the refractive index of the ant |
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