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Inventor: Abdallah; David
Address: Auburn, NY
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5754294 |
Optical micrometer for measuring thickness of transparent wafers |
May 19, 1998 |
| Techniques and systems for measuring absolute thickness, the total thickness variation, and electric resistivity of a semiconductor wafer in a nondestructive optical fashion. Optical absorption is used to measure the absolute thickness of a semiconductor wafer with a light source and a |
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