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Inventor: Abbink; Henry
Address: Westlake Village, CA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7038293 |
Dissipation of a charge buildup on a wafer portion |
May 2, 2006 |
| An apparatus in one example comprises a wafer portion that comprises a conduction layer. Upon exposure of the conduction layer during a etch of the wafer portion, the conduction layer serves to dissipate a portion of a charge buildup on the wafer portion during an etch of the wafer p |
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