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Inventor: Abbink; Henry C.
Address: Thousand Oaks, CA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6374672 |
Silicon gyro with integrated driving and sensing structures |
April 23, 2002 |
| A rotation sensor is formed of three semiconductor wafers. A first wafer comprises a frame that surrounds a paddle. The rotation-sensitive paddle is surrounded on either of the opposed sides of the first wafer by rings of driven elements formed of radially-directed plateaus in the se |
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