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Inventor: Abbasi; Faraz
Address: Indianapolis, IN
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6454821 |
Polishing composition and method |
September 24, 2002 |
| The polishing slurry includes by weight percent, 0.1 to 50 metal oxy-acid accelerator, 0.5 to 50 cerium oxide abrasive particles and balance water. The metal oxy-acid accelerator is formed with a metal selected from the group consisting of chromium, lanthanum and rare earth metals 59 to |
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