| |
|
Inventor: Abaron; Rony
Address: Raanana, IL
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6368182 |
Apparatus for optical inspection of wafers during polishing |
April 9, 2002 |
| A monitoring tool for monitoring an article in a wet environment, the monitoring tool including a monitoring station having an optical unit, a liquid holding unit for receiving the article, and a window, through which at least a portion of the article is viewable by the optical unit, a |
|
|
|
