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Inventor: Aaron; David B.
Address: University City, MO
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 4865710 |
Magnetron with flux switching cathode and method of operation |
September 12, 1989 |
| A magnetron sputtering apparatus is formed with a plurality of cells each for generating an independent magnetic field within a different region in the chamber of the apparatus. Each magnetic field aids in maintaining an ion plasma in the respective region of the chamber. One of a plural |
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