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Inventor:
Aaron; David B.
Address:
University City, MO
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
4865710 Magnetron with flux switching cathode and method of operation September 12, 1989
A magnetron sputtering apparatus is formed with a plurality of cells each for generating an independent magnetic field within a different region in the chamber of the apparatus. Each magnetic field aids in maintaining an ion plasma in the respective region of the chamber. One of a plural


 
 
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