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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Aalund; Martin P.
Address:
Mountain View, CA
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
6520726 Apparatus and method for using a robot to remove a substrate carrier door February 18, 2003
A substrate handling system with integrated door removal assembly for an environmentally controlled substrate processing chamber is provided. The system includes a robot positioned within the chamber. A drive mechanism is connected to the robot. A door interface mechanism is attached to


 
 
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