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Inventor: Aaltonen; Titta
Address: Helsinki, FI
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7220451 |
Process for producing metal thin films by ALD |
May 22, 2007 |
| Electrically conductive noble metal thin films can be deposited on a substrate by atomic layer deposition. According to one embodiment of the invention a substrate with a surface is provided in a reaction chamber and a vaporised precursor of a noble metal is pulsed into the reaction |
| 6824816 |
Process for producing metal thin films by ALD |
November 30, 2004 |
| The invention relates generally to processes for producing electrically conductive noble metal thin films on a substrate by atomic layer deposition. According to one embodiment of the invention a substrate with a surface is provided in a reaction chamber and a vaporised precursor of a |
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