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Inventor:
Aagard; Roger L.
Address:
Prior Lake, MN
No. of patents:
2
Patents:












Patent Number Title Of Patent Date Issued
5389225 Solid-state oxygen microsensor and thin structure therefor February 14, 1995
A solid-state oxygen microsensor which measures the potential difference (EMF) generated by two spaced apart electrodes deposited on a solid oxygen ion conducting electrolyte and located in a known and preferably constant temperature gradient in the same ambient atmosphere. Output voltag
4651120 Piezoresistive pressure sensor March 17, 1987
A piezoresisitve pressure sensor having a diaphragm of silicon nitride with a stressed resistor under the edge of the diaphragm in a single crystal supporting wafer. The signal is derived from the stress in the silicon where the diaphragm attaches to the edge of the opening etched throug










 
 
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