Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor slice cassette transport unit










Image Number 2 for United States Patent #RE34311.

A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in the people-occupied area of the clean room and a rear portion (46) positioned in the process machine area aerodynamically isolated from people. A moveable glider plate (50) is adapted to receive the carrier (10) and is initially positioned in an aperture provided in the upper surface of forward portion (42). A gearing mechanism (54) is provided which cooperates with glider plate (50) to move the semiconductor slice cassettes mounted on the base of carrier (10) between forward portion (42) and rear portion (46). The semiconductor slices are shielded from particulate contamination as the semiconductor cassette is transported on glider plate (50) between forward portion (42) and rear portion (46) and for evacuating any particulate contamination generated within transport mechanism (40) to create a negative pressure therein relative to the people-occupied area and the process machine area.








 
 
  Recently Added Patents
Resist pattern forming method and developer
Electrolyte including amide compound and electrochemical device including the same
Electric vehicle with pitch control device
Electrical tracking resistance compositions, methods and articles of manufacture
Acquiring access to a token controlled system resource
Light-weight battery apparatus
Charged particle microscope providing depth-resolved imagery
  Randomly Featured Patents
Vehicle windshield washer nozzle
Multi-instance, multi-user animation platforms
Press forming method for metal sheet and frame part for automotive body manufactured thereby
Refillable dispenser and cartridge
Data storage cache system shutdown scheme
Memory arrangement with a read-out circuit for a static memory cell
Carrier for bioreactor and method of producing the same
Ultra-slim telephone set
Wiper appliance
Interactive interface mounting assembly for amusement and theme park rides