Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor slice cassette transport unit










Image Number 2 for United States Patent #RE34311.

A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in the people-occupied area of the clean room and a rear portion (46) positioned in the process machine area aerodynamically isolated from people. A moveable glider plate (50) is adapted to receive the carrier (10) and is initially positioned in an aperture provided in the upper surface of forward portion (42). A gearing mechanism (54) is provided which cooperates with glider plate (50) to move the semiconductor slice cassettes mounted on the base of carrier (10) between forward portion (42) and rear portion (46). The semiconductor slices are shielded from particulate contamination as the semiconductor cassette is transported on glider plate (50) between forward portion (42) and rear portion (46) and for evacuating any particulate contamination generated within transport mechanism (40) to create a negative pressure therein relative to the people-occupied area and the process machine area.








 
 
  Recently Added Patents
Wafer level packaging
Mobile tablet information handling system support
Pyridazine compounds for controlling invertebrate pests
High dynamic range pixel structure
Preserving privacy of digital communication information
Amide derivatives, process for preparation thereof and use thereof as insecticide
Hard disk drives having different rotational speeds
  Randomly Featured Patents
Optical-fiber cable connector assembly
Air compressor
Medical device and method for stimulating a physiological event in a patient with a stimulation intensity automatically adapting to the physical activity of the patient
Method for inhibiting loss of cognitive functions employing an ace inhibitor
Multijunction photovoltaic cell fabrication
Sealing arrangement in hydraulic press
Time based wireless access provisioning
Remote control for battery electrical system tester apparatus and method
Silver salt film/electronic still camera
Benzimidazole derivative compositions and medical use thereof