Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor slice cassette transport unit










Image Number 2 for United States Patent #RE34311.

A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in the people-occupied area of the clean room and a rear portion (46) positioned in the process machine area aerodynamically isolated from people. A moveable glider plate (50) is adapted to receive the carrier (10) and is initially positioned in an aperture provided in the upper surface of forward portion (42). A gearing mechanism (54) is provided which cooperates with glider plate (50) to move the semiconductor slice cassettes mounted on the base of carrier (10) between forward portion (42) and rear portion (46). The semiconductor slices are shielded from particulate contamination as the semiconductor cassette is transported on glider plate (50) between forward portion (42) and rear portion (46) and for evacuating any particulate contamination generated within transport mechanism (40) to create a negative pressure therein relative to the people-occupied area and the process machine area.








 
 
  Recently Added Patents
Engine RPM control device
Image forming apparatus
Semiconductor memory device
Attribute category enhanced search
Developing device
Aggregating completion messages in a sideband interface
Printed circuit board unit having routing unit mounted thereon and computer device having the same
  Randomly Featured Patents
Push toy scooter wagon
Method and apparatus for monitoring an environmental condition with a tag
Access floor panel having intermingled directional and non-directional air passageways
Motor compressor with lubricant separation
Gear shift device
Array substrate having common electrode with slits that overlap data lines, and liquid crystal display apparatus having the array substrate
Piperazine derivates and their use for the treatment of neurological and psychiatric diseases
Cap for container
Spring tension holding means
Maize variety hybrid X13B597