Resources Contact Us Home
Semiconductor slice cassette transport unit

Image Number 2 for United States Patent #RE34311.

A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in the people-occupied area of the clean room and a rear portion (46) positioned in the process machine area aerodynamically isolated from people. A moveable glider plate (50) is adapted to receive the carrier (10) and is initially positioned in an aperture provided in the upper surface of forward portion (42). A gearing mechanism (54) is provided which cooperates with glider plate (50) to move the semiconductor slice cassettes mounted on the base of carrier (10) between forward portion (42) and rear portion (46). The semiconductor slices are shielded from particulate contamination as the semiconductor cassette is transported on glider plate (50) between forward portion (42) and rear portion (46) and for evacuating any particulate contamination generated within transport mechanism (40) to create a negative pressure therein relative to the people-occupied area and the process machine area.

  Recently Added Patents
Modulators of cystic fibrosis transmembrane conductance regulator
Latch-up free ESD protection
ESD protection device and method for producing the same
Linerless labels
Use of deuterium oxide for the treatment of virus-based diseases of the respiratory tract
Frame syncrhonization in orthogonal frequency-division multiplexing systems
Pickup device and method for manufacturing the same
  Randomly Featured Patents
Processed pigment, pigment-dispersed composition, colored photosensitive composition, color filter, liquid crystal display element, and solid image pickup element
Memory module having on-chip surge capacitors
Device and method for drying noodles by hot air
Mounting assembly
Carriage for a separation element, separation element and device
Power line phase coupler system
Heat flow detector for recessed incandescent fixtures
Flex-rigid wiring board and method for manufacturing the same
Gas separation using organic-vapor-resistant membranes