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In-situ determination of energy species yields of intense particle beams

Image Number 5 for United States Patent #H235.

An arrangement is provided for the in-situ determination of energy species yields of intense particle beams. The beam is directed onto a target surface of known composition, such that Rutherford backscattering of the beam occurs. The yield-energy characteristic response of the beam to backscattering from the target is analyzed using Rutherford backscattering techniques to determine the yields of energy species components of the beam.

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