Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Lithographic error reduction by pattern matching










Image Number 5 for United States Patent #8495525.

A library of waivable images with corresponding waiver constraints is generated. Each of the waivable images is an image of a region of a reference design layout including a raw error as determined by an optical rule checks (ORC) program and does not require a correction for printability on a photoresist layer. A list of raw errors is generated by running the ORC program on a target design layout. Error region images corresponding to the list of raw errors are generated by selecting a region of the target design layout around points corresponding to the raw errors. A list of matches between the library of waivable images and the error region images is generated. By removing a subset of raw errors that correspond to a subset of the list of matches from the list of raw errors, a list of real errors is generated.








 
 
  Recently Added Patents
Method for determining the local position of at least one mobile radio communication device based on predetermined local positions of adjacent radio communication devices, associated radio com
Facility to reuse paper
Method and system for calibrating laser profiling systems
Isolated nucleic acid molecule encoding an antibody that reduces GDF-8 activity
Smartphone
Triple-action pest control formulation and method
Electric rotating machine for vehicle
  Randomly Featured Patents
Low distortion amplifier
Weight loss composition
Closed face racing helmet mug
High speed digital computer data transfer system having reduced bus state transition time
Priming apparatus for liquid ink writing instruments
Method of assembling and mounting a torque transmitting apparatus
Seat adjustment and dumping mechanism with memory of adjustment
Method and apparatus for extending contact center configuration data for access by third-party applications over a data network
Sense amplifier with adaptive reference generation
Computer system including a promise array