Resources Contact Us Home
Integrated circuit having back gating, improved isolation and reduced well resistance and method to fabricate same

Image Number 6 for United States Patent #8445356.

Disclosed is a method of forming a structure and a resulting structure. The method includes providing a semiconductor substrate; forming a first opening to a first depth in the semiconductor substrate; amorphizing semiconductor sidewalls of an upper portion of the first opening leaving unamorphized semiconductor sidewalls in a lower portion of the first opening; enlarging only the lower portion of the first opening using an etch process that is selective to the unamorphized semiconductor sidewalls; filling the first opening with an insulator material to form a deep trench isolation (DTI) structure and implanting a first well region and a second well region into the semiconductor substrate. The first well and the second well are separated from one another by the enlarged lower portion of the first opening. In the structure sidewalls of a top portion of a DTI and sidewalls of an STI are formed of doped, re-crystallized silicon.

  Recently Added Patents
Catalyst and process of hydrocarbon feedstock reformation to hydrogen and carbon monoxide
Cryptography on a simplified elliptical curve
Device for preparing a body fluid for a bacteriological analysis
System and method for redundant array copy removal in a pointer-free language
Multi-dimensional tuple support in rule engines
Vehicle fender
Modular utility rack
  Randomly Featured Patents
Glass material for molding optical elements
Facsimile which controls received data destination and stores or prints the data if the destination is unavailable
Method for assigning network addresses, network and network node thereof
Handbag with interchangeable liner
Device for fastening an article, disposed at an end of a cylindrical shaft, at a coupling member of a coupling means
Electronic balance having a calibration weight arrangement
Alignment assembly for electrical connectors
Heli-hover amphibious surface effect vehicle
High speed curved position sensitive detector
Cementitious compositions for oil well cementing applications