Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Micromirror arrays having self aligned features










Image Number 19 for United States Patent #8335029.

Methods, arrays, and systems for the optical analysis of multiple chemical, biological, or biochemical reactions are provided. The invention includes methods for producing arrays of micromirrors on transparent substrates, each micromirror comprising a nanostructure or optical confinement on its top. The arrays are produced by a process in which lateral dimensions of both the nanostructures and micromirrors are defined in a single step, allowing for control of the relative placement of the features on the substrate, minimizing the process-related defects, allowing for improved optical performance and consistency. In some aspects, the invention provides methods of selectively etching large features on a substrate while not concurrently etching small features. In some aspects, the invention provides methods of etching large features on a substrate using hard mask materials.








 
 
  Recently Added Patents
Display device and projector
Method and system for checking citations
Method and device for evaluating evolution of tumoural lesions
Image forming apparatus
Touchscreen with extended conductive pattern
Apparatus for generating electrical energy from rocking activated energy
Power-on reset circuit
  Randomly Featured Patents
Method for reducing peak-to-average power ratios in a multi-carrier transmission system
High-frequency module
High thermal emissive semiconductor device package
Self-emission type display device
Sealed insulation displacement connector
Concealed magazine slot arrangement for chest harness, midriff harness, vest, or the like
Method of producing silicon nanoparticles from stain-etched silicon powder
Compositions and methods for consolidating unconsolidated subterranean formations
Bottle
Tailgate display table