Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Micromirror arrays having self aligned features










Image Number 16 for United States Patent #8335029.

Methods, arrays, and systems for the optical analysis of multiple chemical, biological, or biochemical reactions are provided. The invention includes methods for producing arrays of micromirrors on transparent substrates, each micromirror comprising a nanostructure or optical confinement on its top. The arrays are produced by a process in which lateral dimensions of both the nanostructures and micromirrors are defined in a single step, allowing for control of the relative placement of the features on the substrate, minimizing the process-related defects, allowing for improved optical performance and consistency. In some aspects, the invention provides methods of selectively etching large features on a substrate while not concurrently etching small features. In some aspects, the invention provides methods of etching large features on a substrate using hard mask materials.








 
 
  Recently Added Patents
Imidazolidine-2,4-dione derivatives, and use thereof as a cancer drug
System and method for interactive image-based modeling of curved surfaces using single-view and multi-view feature curves
Method and device for processing broadcast packets/multicast control messages
Implementing state-of-the-art gate transistor, sidewall profile/angle control by tuning gate etch process recipe parameters
Piperazinedione compounds
Information processing apparatus and storage medium for storing information processing program
Direct connect single layer touch panel
  Randomly Featured Patents
Image display device
Security sticker and method for manufacturing the same
Detection of islanded behavior and anti-islanding protection of a generator in grid-connected mode
Compensating for cognitive load in jumping back
Process for producing ribavirin
5-Z-octenyl esters, process for their preparation and their use
Motor vehicle with electronic clutch management system
Modular surface such as for use in sports
Method of fabricating CMOS inverter and integrated circuits utilizing strained silicon surface channel MOSFETs
Integrated hydraulic mount for active vibration control system