Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Micromirror arrays having self aligned features










Image Number 11 for United States Patent #8335029.

Methods, arrays, and systems for the optical analysis of multiple chemical, biological, or biochemical reactions are provided. The invention includes methods for producing arrays of micromirrors on transparent substrates, each micromirror comprising a nanostructure or optical confinement on its top. The arrays are produced by a process in which lateral dimensions of both the nanostructures and micromirrors are defined in a single step, allowing for control of the relative placement of the features on the substrate, minimizing the process-related defects, allowing for improved optical performance and consistency. In some aspects, the invention provides methods of selectively etching large features on a substrate while not concurrently etching small features. In some aspects, the invention provides methods of etching large features on a substrate using hard mask materials.








 
 
  Recently Added Patents
Apparatus for tuning a musical instrument, and a related instrument
Malicious attack detection and analysis
Personalized location information for mobile devices
Method of interfacing a host operating through a logical address space with a direct file storage medium
Matching geometry generation and display of mammograms and tomosynthesis images
Diagnostic data interchange
Wafer processing method and system using multi-zone chuck
  Randomly Featured Patents
Hydrogen generating material, hydrogen generator and fuel cell
Automute detection in digital audio amplifiers
Side airbag unit for vehicles
Oligomerization catalyst and process
CMOS transistor design for shared N+/P+ electrode with enhanced device performance
Vehicle wheel
Integrated circuit package system for stackable devices
Limited angle rotary actuator
Interdental toothbrush
Method and apparatus for managing data of a portable device using a virtual device for the portable device, and a user interface method using the same