Resources Contact Us Home
Micromirror arrays having self aligned features

Image Number 11 for United States Patent #8335029.

Methods, arrays, and systems for the optical analysis of multiple chemical, biological, or biochemical reactions are provided. The invention includes methods for producing arrays of micromirrors on transparent substrates, each micromirror comprising a nanostructure or optical confinement on its top. The arrays are produced by a process in which lateral dimensions of both the nanostructures and micromirrors are defined in a single step, allowing for control of the relative placement of the features on the substrate, minimizing the process-related defects, allowing for improved optical performance and consistency. In some aspects, the invention provides methods of selectively etching large features on a substrate while not concurrently etching small features. In some aspects, the invention provides methods of etching large features on a substrate using hard mask materials.

  Recently Added Patents
System and method for routing streaming data requests
Systems and methods for providing a video playlist
Battery loading and unloading mechanism
Elementary network description for efficient link between neuronal models and neuromorphic systems
Process for the preparation of morphinane analogues
Method for identifying bacteria in a sample
Systems and methods for vehicle cruise control
  Randomly Featured Patents
Encoding method and system for reducing inter-symbol interference effects in transmission over a serial link
Photosensitive polyimide-precursor formulation
Method and system for managing learning materials presented offline
Hand and wrist support
Collision avoiding system and protocol for a multiple access digital communications system
Image display device
Alkylated iminodibenzyls as antioxidants
3,3-dioxy-4,4,4-trifluorobutyric acid derivatives
Desk top organizer
Tub suspension assemblies