Resources Contact Us Home
Method of manufacturing semiconductor device having capacitor under bit line structure

Image Number 6 for United States Patent #8247304.

Provided is a method of manufacturing a semiconductor device having a capacitor under bit line (CUB) structure capable of increasing a gap between a bit line in a cell area and an upper plate of a capacitor, reducing coupling capacitance therebetween, and forming deep contacts in a logic area. A capacitor including a lower electrode, a dielectric material layer, and an upper electrode is formed in an opening of a first insulating layer for exposing a first part of a semiconductor substrate in a cell area. A second insulating layer is formed on the first insulating layer. The first and second insulating layers are etched. First and second contact plugs are formed in first and second contact holes for exposing second and third parts in the cell area and the logic area. A third insulating layer including first through third conductive studs is formed on the second insulating layer. A fourth insulating layer including a bit line and first and second wires contacted with the first through third conductive studs is formed.

  Recently Added Patents
Lipoprotein analysis by differential charged-particle mobility
Simultaneous wafer bonding and interconnect joining
Semiconductor device manufacture in which minimum wiring pitch of connecting portion wiring layer is less than minimum wiring pitch of any other wiring layer
Synthesis of 8-amino boron dipyrromethenes having blue fluorescence
Liquid crystal display device
Wire catalyst for hydrogenation/dehydrogenation reaction and manufacturing method therefor
Flash multi-level threshold distribution scheme
  Randomly Featured Patents
Plural line buffer type memory LSI
Invivo high throughput toxicology screening method
Device and method for limiting the extent to which circuits in integrated circuit dice electrically load bond pads and other circuit nodes in the dice
Process for utilizing vertical autoclave in polymerization of vinyl chloride
Information processing device and method for sequence control and data processing
System and apparatus for mobile information handling
Control unit for marine engines employing neutral lock mechanism
Fiber optic interferometric thermometer with serially positioned fiber optic sensors
Nonvolatile memory device having a bit line select voltage generator adapted to a temperature change
Storage device and storage device control method