Resources Contact Us Home
Method of manufacturing semiconductor device having capacitor under bit line structure

Image Number 14 for United States Patent #8247304.

Provided is a method of manufacturing a semiconductor device having a capacitor under bit line (CUB) structure capable of increasing a gap between a bit line in a cell area and an upper plate of a capacitor, reducing coupling capacitance therebetween, and forming deep contacts in a logic area. A capacitor including a lower electrode, a dielectric material layer, and an upper electrode is formed in an opening of a first insulating layer for exposing a first part of a semiconductor substrate in a cell area. A second insulating layer is formed on the first insulating layer. The first and second insulating layers are etched. First and second contact plugs are formed in first and second contact holes for exposing second and third parts in the cell area and the logic area. A third insulating layer including first through third conductive studs is formed on the second insulating layer. A fourth insulating layer including a bit line and first and second wires contacted with the first through third conductive studs is formed.

  Recently Added Patents
Systems and methods for processing telephone calls
Regenerative braking control to mitigate powertrain oscillation
System and method for combined I/Q generation and selective phase interpolation
Switching apparatus and controlling method thereof
Printing apparatus and method of operation of a printing apparatus
Control device
Linked area parameter adjustment for spinal cord stimulation and associated systems and methods
  Randomly Featured Patents
Optical path control device
Ammunition magazine
Tool for electrochemical machining
Heatable canine blanket
System and method for filling vias
Image-taking apparatus correcting image-taking parameter during normal image-taking based on correction amount set in calibration mode
Candle float or the like
Process for producing etoposide
Process for the removal of mercury from solutions contaminated with mercury
Knitted slide fastener