Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing semiconductor device having capacitor under bit line structure










Image Number 13 for United States Patent #8247304.

Provided is a method of manufacturing a semiconductor device having a capacitor under bit line (CUB) structure capable of increasing a gap between a bit line in a cell area and an upper plate of a capacitor, reducing coupling capacitance therebetween, and forming deep contacts in a logic area. A capacitor including a lower electrode, a dielectric material layer, and an upper electrode is formed in an opening of a first insulating layer for exposing a first part of a semiconductor substrate in a cell area. A second insulating layer is formed on the first insulating layer. The first and second insulating layers are etched. First and second contact plugs are formed in first and second contact holes for exposing second and third parts in the cell area and the logic area. A third insulating layer including first through third conductive studs is formed on the second insulating layer. A fourth insulating layer including a bit line and first and second wires contacted with the first through third conductive studs is formed.








 
 
  Recently Added Patents
Magnetic resonance imaging apparatus
Method for resource allocation in a wireless communication network, method for error-free transmission of information, node and wireless communication network
Computer-implemented method of constructing a stock index using index rotation
Semiconductor apparatus
Method for producing (meth)acrylic anhydride, method for storing (meth)acrylic anhydride, and method for producing (meth)acrylate
Memory system with data line switching scheme
System and method for removing oxide from a sensor clip assembly
  Randomly Featured Patents
Faceguard
Firearm magazine retention and delivery system
Fluid for releasing stuck drill pipe
GMR sensor with oriented hard bias stabilization
Decorated bandage
Microwave steamer base
Sunvisor provided with means for automatically returning the panel to a stable position
Vacuum cleaning device with a suction nozzle
Truss employing both metallic and non-metallic webs
Carbapenams and carbapen-2-ems and process therefor