Resources Contact Us Home
Method of manufacturing semiconductor device having capacitor under bit line structure

Image Number 10 for United States Patent #8247304.

Provided is a method of manufacturing a semiconductor device having a capacitor under bit line (CUB) structure capable of increasing a gap between a bit line in a cell area and an upper plate of a capacitor, reducing coupling capacitance therebetween, and forming deep contacts in a logic area. A capacitor including a lower electrode, a dielectric material layer, and an upper electrode is formed in an opening of a first insulating layer for exposing a first part of a semiconductor substrate in a cell area. A second insulating layer is formed on the first insulating layer. The first and second insulating layers are etched. First and second contact plugs are formed in first and second contact holes for exposing second and third parts in the cell area and the logic area. A third insulating layer including first through third conductive studs is formed on the second insulating layer. A fourth insulating layer including a bit line and first and second wires contacted with the first through third conductive studs is formed.

  Recently Added Patents
Computer product, information retrieval method, and information retrieval apparatus
Method for execution upon processing of at least one histological sample
Subpixel-based image down-sampling
Method and system for migrating object update messages through synchronous data propagation
Method and system for fail-safe call survival
Lighting fixture
Double diffused metal oxide semiconductor device and manufacturing method thereof
  Randomly Featured Patents
High accuracy optical rotation sensing system
Face gear for spinning reel
Cooling arrangement for a tapered turbine blade
Systems and methods for generating an accounting document
Bone fracture fixation device
Minimum tillage toolbar and method for using same
Single edge razor blade with integral back
Signal demodulating apparatus capable of effectively suppressing the beat interference caused by the pilot signal
Method and apparatus for reduction of spectral fluctuations
Method and apparatus for data processing