Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming tungsten film at a surface of a processing target material, film-forming apparatus, storage medium and semiconductor device with a tungsten film










Image Number 17 for United States Patent #8168539.

A tungsten film with a lower specific resistance and a lower fluorine concentration over its boundary with the base barrier layer, which adheres to the barrier layer with a high level of reliability, compared to tungsten films formed through methods in the related art, is formed. The tungsten film is formed through a process in which a silicon-containing gas is delivered to a wafer M placed within a processing container 14 and a process executed after the silicon-containing gas supply process, in which a first tungsten film 70 is formed by alternately executing multiple times, a tungsten-containing gas supply step for supplying a tungsten-containing gas and a hydrogen compound gas supply step for supplying a hydrogen compound gas with no silicon content with a purge step in which an inert gas is supplied into the processing container and/or an evacuation step for evacuating the processing container executed between the tungsten-containing gas supply step and the hydrogen compound gas supply step.








 
 
  Recently Added Patents
Method and apparatus for exercise monitoring combining exercise monitoring and visual data with wireless internet connectivity
Stability control system with body-force-disturbance heading correction
Phase-change memory device having multiple diodes
Method and apparatus for closed-loop control of anti-tachyarrhythmia pacing using hemodynamic sensor
Nucleotide sequence coding for variable regions of .beta. chains of human T lymphocyte receptors, corresponding peptide segments and the diagnostic and therapeutic uses
Semiconductor device and method of forming interconnect structure with conductive pads having expanded interconnect surface area for enhanced interconnection properties
LED package chip classification system
  Randomly Featured Patents
Mobile water jet sweep cleaner
Direct tube repair by laser welding
Process for the production of a cycloalkanone and/or a cycloalkanol
Knuckle for a corner device
Surge arrester having disconnector housed by mounting bracket and end cap
Gasification of ash-containing solid fuels
Method and system for providing a mobile network notification service
Thermoplastic olefinic compositions
Gateway configuration for controlling data flow in modem over packet networks
Method for electronically detecting at least one specific interaction between probe molecules and target biomolecules