Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming tungsten film at a surface of a processing target material, film-forming apparatus, storage medium and semiconductor device with a tungsten film










Image Number 15 for United States Patent #8168539.

A tungsten film with a lower specific resistance and a lower fluorine concentration over its boundary with the base barrier layer, which adheres to the barrier layer with a high level of reliability, compared to tungsten films formed through methods in the related art, is formed. The tungsten film is formed through a process in which a silicon-containing gas is delivered to a wafer M placed within a processing container 14 and a process executed after the silicon-containing gas supply process, in which a first tungsten film 70 is formed by alternately executing multiple times, a tungsten-containing gas supply step for supplying a tungsten-containing gas and a hydrogen compound gas supply step for supplying a hydrogen compound gas with no silicon content with a purge step in which an inert gas is supplied into the processing container and/or an evacuation step for evacuating the processing container executed between the tungsten-containing gas supply step and the hydrogen compound gas supply step.








 
 
  Recently Added Patents
Receiver and transmitter receiver system
Magnetic recording medium, information storage device, and method of manufacturing magnetic recording medium
Nanofibers containing latent reactive groups
Fabricated leaf tea products
Adaptive contact window wherein the probability that an answering user/expert will respond to a question corresponds to the answering users having response rates that are based on the time of
Multi-radio coexistence
Hybrid fiber constructions to mitigate creep in composites
  Randomly Featured Patents
Sound focusing mechanism and method of estimating acoustic leakage of an object and method of estimating transmission loss of an object
System and method for supplying auxiliary power to a large diesel engine
Resin insulated type semiconductor device
Communication on hold
Memory with EEPROM cell having capacitive effect and method for the reading of such a cell
Extraction of thaumatin
Process for processing residual substances containing at least one nonferrous metal and/or compounds thereof
Formation of filled molding powders of polybenzimidazole and other polymers
Body weight support system
Energy management system and control method using the same, for determining an operation mode of a high voltage direct current system