Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus and device manufacturing method










Image Number 14 for United States Patent #8130360.

An exposure apparatus includes an image sensor, a measurement optical system configured to guide measurement light to obliquely enter the projection optical system, and further, to guide the measurement light returned from the projection optical system to the image sensor, and a control unit configured to calculate surface position information of the substrate based on the output from the image sensor. The control unit calculates the surface position information of the substrate based on an interval between the image, of a mark arranged on the original stage, formed by the measurement light, which has passed through the mark, and the image of the mark formed by the measurement light reflected by the mark.








 
 
  Recently Added Patents
Servo write assembly
Means to securely fixate pacing leads and/or sensors in vessels
Sperm factor sequences
Label with surface ornamentation
Vaccination with killed but metabolically active (KBMA) protozoans with toll-like receptor agonists
Nacelle cover
Intralevel conductive light shield
  Randomly Featured Patents
Electronically programmable gauge
Xylo-LNA analogues
Data processing system and method for processing data
Swimming pool chemical dispenser
Apparatus for pushing conductors into conduit and other structures
Image-forming device with control of developer bias
Adjustable golf club and system and associated golf club heads and shafts
Formazan blue reactive dye
Semiconductor memory device having on-chip error check and correction functions
Lubricating oil for a diesel powered engine and method of operating a diesel powered engine