Resources Contact Us Home
Exposure apparatus and device manufacturing method

Image Number 14 for United States Patent #8130360.

An exposure apparatus includes an image sensor, a measurement optical system configured to guide measurement light to obliquely enter the projection optical system, and further, to guide the measurement light returned from the projection optical system to the image sensor, and a control unit configured to calculate surface position information of the substrate based on the output from the image sensor. The control unit calculates the surface position information of the substrate based on an interval between the image, of a mark arranged on the original stage, formed by the measurement light, which has passed through the mark, and the image of the mark formed by the measurement light reflected by the mark.

  Recently Added Patents
Cationic polymers for antimicrobial applications and delivery of bioactive materials
Polypeptides and immunizing compositions containing gram positive polypeptides and methods of use
Monolithic widely-tunable coherent receiver
Method and apparatus to adjust received signal
Redundant parallel operation of motor vehicle electrical system generators
Systems and methods for identifying malicious domains using internet-wide DNS lookup patterns
Semiconductor device and method for fabricating the same
  Randomly Featured Patents
Pyridoxal analogues and methods of treatment
CNC machine tool
Process for the production of substituted thiazolin-dioxetan substrates and use thereof
Machine tool with bore diameter measuring apparatus and tool position compensating apparatus
Method for measuring degradation level of transformer insulating oil in use, and apparatus for carrying out the method
Reporting invalid parameter values for a parameter-based system
Multifunctional communication terminal connected to two telephone lines and with partial remote supply
Electronic system including high performance backplane driver/receiver circuits
Method of fabricating a coronary-type capacitor in an integrated circuit
Nonvolatile memory cell