Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Manufacturing method of microstructure










Image Number 13 for United States Patent #8129210.

A manufacturing method of a microstructure which enables production of a deep and narrow microstructure in a GaN semiconductor with high precision is provided. The manufacturing method of a microstructure for forming a microscopic structure in a semiconductor has a configuration having a first step of forming a first GaN semiconductor layer on a substrate, a second step of forming a first hole by using etching on the first GaN semiconductor layer formed in the first narrow, and a third step of performing heat-treatment at a temperature from 850.degree. C. to 950.degree. C. inclusive under a gas atmosphere including nitrogen, in order to form a second narrow in which a diameter of the first hole h formed in the second step is made narrower than the diameter of the first hole in an in-plane direction of the substrate.








 
 
  Recently Added Patents
Myoglobin blooming agents, films, packages and methods for packaging
Methods and apparatus for imaging in conjunction with radiotherapy
Per-request control of DNS behavior
Electrode material and use thereof for production of electrochemical cells
Image forming apparatus and system connectable with an authorization apparatus via a communications network, the image forming apparatus comprising an apparatus control section, an initial inq
Method of operating a split gate flash memory cell with coupling gate
Secure service for enabling communication for calling party when communication service for called party is suspended
  Randomly Featured Patents
Hydraulic power booster with a mechanically operated separate brake control valve member
Polypeptides having lipase activity and polynucleotides encoding same
Characterization calibration
Method and system for evaluating uplink inter-cell interference
Lithium ribonate, lithium arabonate and the preparation and purification of these salts
System and method for optimizing contiguous channel operation with cellular reuse
Structure of lock for electric supplying switch
Aqueous process for the preparation of linear quinacridones having a reduced particle size
System and method for flexible data transfer
Method for detecting heat exchanger tube failures and their location when using input/loss performance monitoring of a recovery boiler