Resources Contact Us Home
Manufacturing method of microstructure

Image Number 13 for United States Patent #8129210.

A manufacturing method of a microstructure which enables production of a deep and narrow microstructure in a GaN semiconductor with high precision is provided. The manufacturing method of a microstructure for forming a microscopic structure in a semiconductor has a configuration having a first step of forming a first GaN semiconductor layer on a substrate, a second step of forming a first hole by using etching on the first GaN semiconductor layer formed in the first narrow, and a third step of performing heat-treatment at a temperature from C. to C. inclusive under a gas atmosphere including nitrogen, in order to form a second narrow in which a diameter of the first hole h formed in the second step is made narrower than the diameter of the first hole in an in-plane direction of the substrate.

  Recently Added Patents
Driving apparatus having an optical sensor and a thermal sensor for thermal and aging compensation of backlight module and driving method of backlight module
Focusing apparatus that effectively sets a focus area of an image when a focusing mode is changed
Format for providing traffic information and a method and apparatus for using the format
Color variation control process for molding plastic and composite multi-color articles
Methods and systems for use in tracking targets for direction finding systems
Thermochromic microparticles, dispersions thereof, and manufacturing method thereof, as well as light-modulating coatings, light-modulating films and light-modulating inks
Method and device for synthesizing image
  Randomly Featured Patents
Grid formed with silicon substrate
Muramyl peptide derivatives and immunoregulating compositions containing them
Methods and apparatus for attenuating noise from a cabinet that houses computer equipment
Antithrombogenic membrane mimetic compositions and methods
Decorative edging stone
Small closing bottom for an instrument container for conditioning and refrigerating units
Reception device and reception method
Use of L-carnitine and its alkanoyl derivatives as osmotic agents in solutions for medical use
Frame for folding bicycle
Method and apparatus for placing a product in a flexible recloseable container