Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma doping method and apparatus










Image Number 9 for United States Patent #8129202.

It is intended to provide a plasma doping method and apparatus which are superior in the controllability of the concentration of an impurity that is introduced into a surface layer of a sample. A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided. Every time a prescribed number of samples have been processed, a dummy sample is subjected to plasma doping and then to heating. The conditions for processing of a sample are controlled so that the measurement value of the surface sheet resistance becomes equal to a prescribed value, whereby the controllability of the impurity concentration can be increased.








 
 
  Recently Added Patents
Image forming apparatus and system connectable with an authorization apparatus via a communications network, the image forming apparatus comprising an apparatus control section, an initial inq
Display apparatus, control method thereof, and program
Digital rights management for media streams
Trimming circuit and semiconductor device
Bicycle shifting method
Method of providing user-tailored entertainment experience at hospitality location and hospitality media system thereof
Use of emerging non-volatile memory elements with flash memory
  Randomly Featured Patents
Operating voltage determination for an integrated circuit
Gearmotor, housing and associated method
Brake lever assembly for engaging two brake cables
Towel bar post
Soil survey device and system for precision agriculture
Multilevel phase change memory operation
Weight detecting device for microwave ovens
Axial air gap brushless alternator
Barbeque grill
Variable bandwith control for power factor correction