Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma doping method and apparatus










Image Number 9 for United States Patent #8129202.

It is intended to provide a plasma doping method and apparatus which are superior in the controllability of the concentration of an impurity that is introduced into a surface layer of a sample. A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided. Every time a prescribed number of samples have been processed, a dummy sample is subjected to plasma doping and then to heating. The conditions for processing of a sample are controlled so that the measurement value of the surface sheet resistance becomes equal to a prescribed value, whereby the controllability of the impurity concentration can be increased.








 
 
  Recently Added Patents
Semiconductor devices and methods for changing operating characteristics and semiconductor systems including the same
Triazole derivatives as ghrelin analogue ligands of growth hormone secretagogue receptors
Universal handle extension for unloading butterfly valve for tank trailer or other vehicle
Dynamic web page construction based on determination of client device location
Support tray for server
Method and system for distributing ringback files
Image display device and method of changing first EDID with second EDID wherein the second EDID information is compatible with image display device
  Randomly Featured Patents
Variable cycle propulsion system with mechanical transmission for a supersonic airplane
Corrosion inhibition of hypochlorite solutions using Zn and Ca
Synthetic corn hybrid P66
Rubber composition for tire treads
Fiber optic projection device
Flavoring, fragrance, skin texturizing and deodorant materials and method of making same
Process for making phase holograms
Fast evaluation of average critical area for IC layouts
Transport associated protein splice variants
Video communication system and method for using same