Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma doping method and apparatus










Image Number 9 for United States Patent #8129202.

It is intended to provide a plasma doping method and apparatus which are superior in the controllability of the concentration of an impurity that is introduced into a surface layer of a sample. A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided. Every time a prescribed number of samples have been processed, a dummy sample is subjected to plasma doping and then to heating. The conditions for processing of a sample are controlled so that the measurement value of the surface sheet resistance becomes equal to a prescribed value, whereby the controllability of the impurity concentration can be increased.








 
 
  Recently Added Patents
Projection screen and projection system having the same
Verification of computer-executable code generated from a model
Biological analysis arrangement and approach therefor
Coordinate measuring device and method for measuring with a coordinate measuring device
Cis-alkoxy-substituted spirocyclic 1-H-pyrrolidine-2,4-dione derivatives
Character input device and program for displaying next word candidates based on the candidates' usage history
Generating and modifying textual code interfaces from graphical programs
  Randomly Featured Patents
Water fortress
Interchangeable tissue measuring device
Pulley tire
Boring device
Drying method and apparatus for fibrous material
System and method for providing a customizable web portal service
Tilting router frame
Method for transmitting data between different computers
System and method for optimizing bluetooth transmissions to overcome signal interference
Umbrella with lighting device