Resources Contact Us Home
Plasma doping method and apparatus

Image Number 9 for United States Patent #8129202.

It is intended to provide a plasma doping method and apparatus which are superior in the controllability of the concentration of an impurity that is introduced into a surface layer of a sample. A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided. Every time a prescribed number of samples have been processed, a dummy sample is subjected to plasma doping and then to heating. The conditions for processing of a sample are controlled so that the measurement value of the surface sheet resistance becomes equal to a prescribed value, whereby the controllability of the impurity concentration can be increased.

  Recently Added Patents
Method, apparatus, computer program, and computer readable storage media for controlling the insertion of tab sheets into a print job
Method and apparatus for representing sensory effects and computer readable recording medium storing user sensory preference metadata
Electrophotographic photoreceptor, image-forming apparatus, and electrophotographic cartridge
Portable stand for computer
Measurement of an analyte on the skin using a hue angle
Vehicle battery with cell balancing current paths and method of charging the same
Method and apparatus for diagnosing faults in a hybrid internet protocol network
  Randomly Featured Patents
Method and system for priority-based state transition for high speed data transmission and wireless access networks
Ferroelectric/paraelectric materials, and phase shifter devices, true time delay devices and the like containing same
Rehydratable agarose gels
Automatic gain control system and method using multiple local AGC loops
Umbrella handle
Double drive thru espresso unit
Method for producing wash-free rice and apparatus therefor
Image transferring device for image forming equipment