Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma doping method and apparatus










Image Number 9 for United States Patent #8129202.

It is intended to provide a plasma doping method and apparatus which are superior in the controllability of the concentration of an impurity that is introduced into a surface layer of a sample. A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided. Every time a prescribed number of samples have been processed, a dummy sample is subjected to plasma doping and then to heating. The conditions for processing of a sample are controlled so that the measurement value of the surface sheet resistance becomes equal to a prescribed value, whereby the controllability of the impurity concentration can be increased.








 
 
  Recently Added Patents
Name search using a ranking function
Method of estimating disparity vector, and method and apparatus for encoding and decoding multi-view moving picture using the disparity vector estimation method
Method and system for collaborative self-organization of devices
Mobile terminal and method for controlling operation of the same
Alignment window for drive tool assembly
Apparatus for sensing gearbox shifting positions
Infrared light reflector
  Randomly Featured Patents
Electrical connector assembly
Reference flow liquid chromatography system with stable baseline
Internal combustion engine intake control apparatus and methods
Liquid cartridge and method for manufacturing the same
System for dynamically loading object viewer from client or server
Tile system and method
Integrated circuit with diode-connected transistor for reducing ESD damage
Magnetic memory, and its operating method
Method of estimating fracture geometry, compositions and articles used for the same
Compensating former fold