Resources Contact Us Home
Plasma doping method and apparatus

Image Number 9 for United States Patent #8129202.

It is intended to provide a plasma doping method and apparatus which are superior in the controllability of the concentration of an impurity that is introduced into a surface layer of a sample. A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided. Every time a prescribed number of samples have been processed, a dummy sample is subjected to plasma doping and then to heating. The conditions for processing of a sample are controlled so that the measurement value of the surface sheet resistance becomes equal to a prescribed value, whereby the controllability of the impurity concentration can be increased.

  Recently Added Patents
Catalytic pyrolysis using UZM-44 aluminosilicate zeolite
Method and system for routing telephony communications together with modified calling party identifier information
Carbon blacks having low PAH amounts and methods of making same
Hybrid asynchronous transmission process
Coding circuitry for difference-based data transformation
Image forming apparatus to automatically select a communication condition
Highly specialized application protocol for email and SMS and message notification handling and display
  Randomly Featured Patents
Turbofan engine with reduced noise
Method for determining the carbonate content of washing suspensions
Apparatus for producing disposable headdress
Joint constellation multiple access
Housing for an automatic telephone alarm system
Color picture tube having an inline electron gun with three astigmatic lenses
Availability and location predictor using call processing indications
Blast and ballistic protection system
Multipurpose accessory for portable multimedia device
Semiconductor device applying to the crystalline semiconductor film