Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Double patterning process










Image Number 8 for United States Patent #8129099.

Double patterns are formed by coating a first chemically amplified positive resist composition comprising an acid labile group-bearing resin and a photoacid generator and prebaking to form a resist film on a processable substrate, exposing the resist film to high-energy radiation, PEB, and developing with an alkaline developer to form a first positive resist pattern, treating the first resist pattern to be alkali soluble and solvent resistant, coating a second resist composition and prebaking to form a reversal film, and exposing the reversal film to high-energy radiation, PEB, and developing with an alkaline developer to form a second positive resist pattern. The last development step includes dissolving away the reversed first resist pattern and achieving reversal transfer.








 
 
  Recently Added Patents
Inhibitors of bacterial nitric oxide synthase, and related screening methods
Method for isomerisation of hop alpha-acids using heterogeneous alkaline earth metal based catalysts
Wireless control system for a patient support apparatus
Automated difference recognition between speaking sounds and music
Display panel and gate driving circuit and driving method for gate driving circuit
Secure service for enabling communication for calling party when communication service for called party is suspended
Cis-alkoxy-substituted spirocyclic 1-H-pyrrolidine-2,4-dione derivatives
  Randomly Featured Patents
Method of controllably delivering dopant by limiting the release rate of dopant from a submerged vessel
Substrate processing method and substrate processing system
Automatic equalization for a simulcast communication system
Medical imaging system with integrated service interface
Method and user interface for entering characters
Spill containing refrigerator shelf assembly
Surgical instrument
Digital output telemetering system for recording seismic signals
Door weather strip with seal lips attached thereto
Packaging container