Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Double patterning process










Image Number 8 for United States Patent #8129099.

Double patterns are formed by coating a first chemically amplified positive resist composition comprising an acid labile group-bearing resin and a photoacid generator and prebaking to form a resist film on a processable substrate, exposing the resist film to high-energy radiation, PEB, and developing with an alkaline developer to form a first positive resist pattern, treating the first resist pattern to be alkali soluble and solvent resistant, coating a second resist composition and prebaking to form a reversal film, and exposing the reversal film to high-energy radiation, PEB, and developing with an alkaline developer to form a second positive resist pattern. The last development step includes dissolving away the reversed first resist pattern and achieving reversal transfer.








 
 
  Recently Added Patents
Apparatus and method for transmitting and receiving data streams in wireless system
Metal halide lamps with fast run-up and methods of operating the same
Method of producing probabilities of being a template shape
Plants and seeds of corn variety CV778791
Single-chain variable fragment (scFv) able to recognize and bind CD99 human protein
Data feed management
Image-monitoring method for electroporation treatment and as associated image-monitoring appliance
  Randomly Featured Patents
Image processing method, system and examination apparatus for extracting a threadlike structure in a noisy digital image
Sword
Field effect transistor with thin gate electrode and method of fabricating same
Magnetic fluid-based positioning apparatus and method
Novel prostaglandin intermediates
Process for oxidation treatment of FE.sup.2+ in waste water
Method and apparatus for depth modelling and providing depth information of moving objects
Method and system of measuring cetane values for middle distillate fuels
Data source, data conversion device, inverse data conversion device, auxiliary data file generation device, reception method, medium and information aggregate
Device testing control