Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Double patterning process










Image Number 8 for United States Patent #8129099.

Double patterns are formed by coating a first chemically amplified positive resist composition comprising an acid labile group-bearing resin and a photoacid generator and prebaking to form a resist film on a processable substrate, exposing the resist film to high-energy radiation, PEB, and developing with an alkaline developer to form a first positive resist pattern, treating the first resist pattern to be alkali soluble and solvent resistant, coating a second resist composition and prebaking to form a reversal film, and exposing the reversal film to high-energy radiation, PEB, and developing with an alkaline developer to form a second positive resist pattern. The last development step includes dissolving away the reversed first resist pattern and achieving reversal transfer.








 
 
  Recently Added Patents
Systems and methods for determining muscle force through dynamic gain optimization of a muscle PID controller for designing a replacement prosthetic joint
Virtual appliance update method
Vehicle wheel rim protector
Method of using nutritional compounds dihydroquercetin (taxifolin) and arabinogalactan in combination with dihydroquercetin (taxifolin) to reduce and control cardiometabolic risk factors assoc
Front cover of an electronic device
Electrical converter with variable capacitor
Registration and network access control
  Randomly Featured Patents
Simultaneously acquiring video images and analog signals
Locomotive engine inlet air apparatus and method of controlling inlet air temperature
Measuring circuit arrangement for electricity meters for direct connection
Label distribution protocol label filtering
Tensile specimen measuring apparatus and method
Internal welding head assembly
End closure for a container
Safety suction outlet for pools
Wire for papermaking of microfibrous cellulose-containing sheet and method for producing microfibrous cellulose-containing sheet
Broadcast messaging in peer to peer overlay network