Resources Contact Us Home
Double patterning process

Image Number 4 for United States Patent #8129099.

Double patterns are formed by coating a first chemically amplified positive resist composition comprising an acid labile group-bearing resin and a photoacid generator and prebaking to form a resist film on a processable substrate, exposing the resist film to high-energy radiation, PEB, and developing with an alkaline developer to form a first positive resist pattern, treating the first resist pattern to be alkali soluble and solvent resistant, coating a second resist composition and prebaking to form a reversal film, and exposing the reversal film to high-energy radiation, PEB, and developing with an alkaline developer to form a second positive resist pattern. The last development step includes dissolving away the reversed first resist pattern and achieving reversal transfer.

  Recently Added Patents
Compact exoskeleton arm support device to compensate for gravity
Display apparatus and method of manufacturing the same
Information processing device and activation control method
Test apparatus, transmission apparatus, receiving apparatus, test method, transmission method and receiving method
Electrostatic generator/motor configurations
Systems, methods and computer program products for modeling uncertain future benefits
Coach board
  Randomly Featured Patents
Stack icons representing multiple objects
Quaternary ammonium hydroxides as mercaptan scavengers
Hybrid belt-driven data storage tape cartridge
Compact high-power pulsed terahertz source
Method of reducing NOx in diesel engine exhaust
Methods for treating disease states using oxidized lipoproteins in conjunction with chemotherapeutic effector agents
System for transferring data in high speed between host computer and peripheral device utilizing peripheral interface with accelerated mode
Back-side-of-die, through-wafer guided-wave optical clock distribution networks, method of fabrication thereof, and uses thereof
Air spindle with closed loop speed control
Method for selling content over a network