Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for manufacturing a semiconductor device










Image Number 5 for United States Patent #8129094.

A spacer is formed on side and top portions of a photoresist pattern after a mask process is performed so that the spacer may be used as an etching mask. The spacer is formed using a polymer deposition layer which is a low temperature oxide or nitride that can be deposited on side and top portions of the photoresist pattern at 75.about.220.degree. C. after the mask process is performed. A method for manufacturing a semiconductor device includes forming a bottom anti-reflection coating film on an etch-target layer, patterning a photoresist layer formed on the bottom anti-reflection coating film, forming an insulation layer on a patterned photoresist layer and the bottom anti-reflection coating film, etching back the insulation layer to form a spacer on sidewalls of the patterned photoresist layer, and etching the bottom anti-reflection coating film and the etching target layer exposed by the spacer to form a fine pattern.








 
 
  Recently Added Patents
Materials and methods for stress reduction in semiconductor wafer passivation layers
Systems and methods for determining muscle force through dynamic gain optimization of a muscle PID controller for designing a replacement prosthetic joint
Negative active material for a rechargeable lithium battery, a method of preparing the same, and a rechargeable lithium battery comprising the same
Scalable pixel coverage function-map
Self-correcting amplifier system
Systems and methods for adaptive blind mode equalization
Crosslinked core/shell polymer particles
  Randomly Featured Patents
Communication device
Modular electrical component packaging system
Five-membered heterocyclic compounds
Production of polyacryamide gel filled capillaries for capillary gel electrophoresis
Apparatus, systems and methods for implementing memory embedded search arithmetic logic unit
Method for molding polypropylene resin
Means for the modulation of processes mediated by retinoid receptors and compounds useful therefor
Acknowledge back pager with apparatus for controlling transmit frequency
Method of manufacturing a bipolar transistor
ATM cell/packet switch and communication control method using the same