Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Prevention of photoresist scumming










Image Number 3 for United States Patent #8129093.

A photo acid generator (PAG) or an acid is used to reduce resist scumming and footing. Diffusion of acid from photoresist into neighbors causes a decreased acid level, and thus causes resist scumming. An increased acid layer beneath the resist prevents acid diffusion. In one embodiment, the increased acid layer is a layer of spun-on acid or PAG dissolved in aqueous solution. In another embodiment, the increased acid layer is a hard mask material with a PAG or an acid mixed into the material. The high acid content inhibits the diffusion of acid from the photoresist into neighboring layers, and thus substantially reduces photoresist scumming and footing.








 
 
  Recently Added Patents
Semiconductor memory device, test circuit, and test operation method thereof
Flexible lighting devices
Systems, methods, and media for firewall control via remote system information
Self-diagnostic method and system for implantable cardiac device
Data processing apparatus, activation control method, and computer-readable storage medium
Adding value to a rendered document
Synthesizing VHDL multiple wait FSMS into RT level FSMS by preprocessing
  Randomly Featured Patents
Method for checking and/or determining user data, a computer program product, and an apparatus
Method and apparatus for compensating for imbalances between quadrature signals
Horse hoof protection
Heterocyclyl ligand containing ruthenium and osmium catalysts
Information retrieval system providing secondary content analysis on collections of information objects
Stabilization of amine alanes
Oxidation catalyst and its use for catalyzing liquid phase oxidation reactions
Serial command port method, circuit, and system including main and command clock generators to filter signals of less than a predetermined duration
Sealing a fuel tank against hydrocarbon permeation
Film-forming composition