Resources Contact Us Home
Variable resist protecting groups

Image Number 14 for United States Patent #8129080.

A method and system for patterning a substrate using a dual-tone development process is described. The method and system comprise using a resist material having a polymer backbone with a plurality of protecting groups attached thereto to improve process latitude and critical dimension uniformity for the dual-tone development process.

  Recently Added Patents
NMR, instrumentation, and flow meter/controller continuously detecting MR signals, from continuously flowing sample material
Magnifying glass
Fabric care compositions comprising front-end stability agents
Information processing apparatus and update information obtainment method
Digital microwave radio link with adaptive data rate
Image forming apparatus and job request control method instructed by authenticated users
  Randomly Featured Patents
Control system for variable-pitch boat propeller
Interiorly installable roof mount
Method of transmission power control in a cellular mobile communication system and apparatus thereof
Partial tooth gear bearings
Full grip rounded cookware handle
Drawer type luggage
Common tool center point consumables
Fixed needle syringe with protective needle housing
Operational amplifier and scanning electron microscope using the same
High frequency power amplifier