Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Variable resist protecting groups










Image Number 14 for United States Patent #8129080.

A method and system for patterning a substrate using a dual-tone development process is described. The method and system comprise using a resist material having a polymer backbone with a plurality of protecting groups attached thereto to improve process latitude and critical dimension uniformity for the dual-tone development process.








 
 
  Recently Added Patents
Secure access to customer log data in a multi-tenant environment
Extreme ultraviolet light generation apparatus
Display screen with graphical user interface
Resistor-2 resistor (R-2R) digital-to-analog converter with resistor network reversal
Apparatus for restoring setting information of a board management controller from a backup memory before loading an OS when a system board is replaced
Hair motion compositor system for use in a hair/fur pipeline
Image-monitoring method for electroporation treatment and as associated image-monitoring appliance
  Randomly Featured Patents
Sorter for records having different amounts of data
Marine signal flag
Surface pattern for tire sidewall
Battery terminal connector
Wiring device
Process for preparing benzo[b]thiophenes
Fibrillated polyester textile materials
Method, apparatus and system for inspecting a workpiece having a curved surface
Fuse structure used in an integrated circuit device
Powered roller skates