Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Variable resist protecting groups










Image Number 14 for United States Patent #8129080.

A method and system for patterning a substrate using a dual-tone development process is described. The method and system comprise using a resist material having a polymer backbone with a plurality of protecting groups attached thereto to improve process latitude and critical dimension uniformity for the dual-tone development process.








 
 
  Recently Added Patents
System and method for reducing antivirus false positives
Quantum dot template for fast and simultaneous detection of different infectious agents
Content display system
Selecting a converter operating mode of a PA envelope power supply
Power consumption management in a MIMO transceiver and method for use therewith
Methods and systems for providing a business repository
Mobile phone
  Randomly Featured Patents
Materials-handling system using autonomous transfer and transport vehicles
Driver-assisted base address register mapping
Cable position adjusting structure
Method for sample analysis by sputtering with a particle beam, and device to implement said method
Bandage for the arm with enclosure for the shoulder
Tracheostomy tube with ring pull removable inner cannula
Dynamically creating tables to store received data
Production of formaldehyde in a fluidized bed with a fixed temperature gradient
Triglyceride macromonomers
Apparatus and method for determining a mechanical property of an organ or body cavity by impedance determination