Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for inspecting defects










Image Number 10 for United States Patent #8121398.

A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.








 
 
  Recently Added Patents
Data distribution unit for vehicle entertainment system
Thermoplastic fluoropolymer composition
Method for adjusting link speed and computer system using the same
Fuser member having composite outer layer
Epilation apparatus
Accessing a base station
Pixel structure of a solid-state image sensor employing a charge sorting method
  Randomly Featured Patents
Network for carrier phase differential GPS corrections
Facsimile apparatus that saves image data in an external device through a network
Method for transporting a bone segment in order to bridge a bone defect and device for carrying out the method
Operating system having external media layer, workflow layer, internal media layer, and knowledge base for routing media events between transactions
IV flow rate regulator
Diphenylhexene composition for use in treating liver carcinoma and psoriasis
Method for up converting a transmitted signal and down converting a received signal
Automatic and manual splitter shifting control assembly
Process for the preparation of (2R)-2-propyloctanoic acid
Wireless cable networking gateway and Wi-Fi system incorporating the same