Resources Contact Us Home
Method and apparatus for inspecting defects

Image Number 10 for United States Patent #8121398.

A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.

  Recently Added Patents
2,4-disubstituted pyrimidines useful as kinase inhibitors
Content display monitor
Authoring method, authoring device and program
Method and apparatus for generating images using a color field sequential display
Electrical conduit containing a fire-resisting thermoplastic composition
Side portion of a circular saw blade
Lettuce sister lines PX06514083, PX06514153, PX06514201 and PX06514204
  Randomly Featured Patents
Selectively rotatable and torsionally flexible aerodynamic control apparatus
Image pickup apparatus and image pickup method
Method for determining a skew angle of a bitmap image and de-skewing and auto-cropping the bitmap image
Fountain-type porous roller with central bearing flange
Low ripple x-ray generator
System and method for optimizing the selection and delivery of advertisements
Plant treating mixtures and methods utilizing spores of Bacillus uniflagellatus
Portable battery charger
Process for the preparation of plastics containing thermoplastic polyurethanes