Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for inspecting defects










Image Number 10 for United States Patent #8121398.

A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.








 
 
  Recently Added Patents
Isolated Australian coral reef fluorescent proteins and cell-based kinase or phosphatase platforms for cancer drug development
Manufactured product configuration
Point-in-time copies in a cascade using maps and fdisks
Method and system for phase-sensitive magnetic resonance imaging
Method of transmitting and receiving a paging message in a mobile communication system
Control system for an internal combustion engine
Leg stretching device
  Randomly Featured Patents
Heterocyclic 2,3-dihydrobenzofuran herbicides
Micromechanical light steering optical switch
Heterostructures for III-nitride light emitting devices
Emergency replacement belt
Method for fabricating a single-crystal semiconductor
Light-sensitive composition for use as a soldermask and process
Display screen with graphical user interface
Adjustable retaining apparatus
Hydraulic clutch fill control systems for a transmission of a vehicle
Closure device for pet food cans