Resources Contact Us Home
Method and apparatus for inspecting defects

Image Number 10 for United States Patent #8121398.

A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.

  Recently Added Patents
Portable, single member housing cord protector
Computerized apparatus for identifying industries for potential transfer of a job function
Systems and methods for managing fleet services
Semiconductor device and method for fabricating the same
Dual work function recessed access device and methods of forming
Memory device and method for dynamic random access memory having serial interface and integral instruction buffer
  Randomly Featured Patents
Laminated bus bar and method of manufacture
Photovoltaic element and method for forming the same
Lightweight high power electromotive device
Method and apparatus for alerting a target that it is subject to sensing and restricting access to sensed content associated with the target
Dispenser with overcap
Mixing tray assembly
Processing reduction in CDMA telephones
Treatment process for removing fluoride impurities from aluminosilicates
Starter motor for an internal combustion engine
Stabilization system and method