Resources Contact Us Home
Method and apparatus for inspecting defects

Image Number 10 for United States Patent #8121398.

A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.

  Recently Added Patents
System and method for configuring software applications in a motor vehicle
Functional component compensation reconfiguration system and method
Apparatus and method for providing vehicle data for testing product
Bicyclic azaheterocyclic carboxamides
Video editing apparatus
Data scrambling in memory devices
Poloxamer foamable pharmaceutical compositions with active agents and/or therapeutic cells and uses
  Randomly Featured Patents
Carbonated beverage bottle handle, pour and storage device
Data processing system
Method of patterning noble metals for semiconductor devices by electropolishing
Exposure device and image forming apparatus
Method for semiconductor circuit
Snorkel mast for a semi-submersible vehicle
2-Substituted-indole-1-lower-alkanecarboxamides having anti-secretory or anti-ulcer activity
Baby teether toy
Water sprinkling apparatus
Method of reducing the viscosity of hydrocarbon fluids