Resources Contact Us Home
Method and apparatus for inspecting defects

Image Number 10 for United States Patent #8121398.

A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.

  Recently Added Patents
Method and system for weighted fair queuing
Method to alter silicide properties using GCIB treatment
Storage system comprising multiple microprocessors and method for sharing processing in this storage system
Caprazene as a novel compound and derivatives thereof, and caprazol as a novel compound and derivatives thereof
Amide derivatives, process for preparation thereof and use thereof as insecticide
Protecting a gaming machine from rogue code
Grounding fitting
  Randomly Featured Patents
Coolable nozzle and method for producing such a nozzle for a rocket engine
Automatic toilet bowl cleaner
Crystalline pharmaceutical
Combine harvester
Water dispensing system
Apparatus for sharpening a circular blade
Method, circuit, and apparatus for mitigating effects of wavelength-dependent atmospheric transmission characteristics on atmospheric optical telecommunication
Package containing optical fibres made of glass and apparatus for packing glass optical fibres
Devices and method for using a DC-DC converter in a mobile handset