Resources Contact Us Home
Method and apparatus for inspecting defects

Image Number 10 for United States Patent #8121398.

A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.

  Recently Added Patents
Managing a packet service call within mobile communications user equipment
3D IC method and device
Charged-particle beam lens
Photoconductor cartridge
System, method and computer program product for sharing a single instance of a database stored using a tenant of a multi-tenant on-demand database system
Lubricant supplying device, process cartridge, and image forming apparatus
High-efficiency preambles for communications systems over pseudo-stationary communication channels
  Randomly Featured Patents
Elongated and multiple spacers in activatible prodrugs
Blood coagulation test system
Semiconductor chip and production thereof, and semiconductor device having semiconductor chip bonded to solid device
TiW barrier metal process
Removal of organic halides from hydrocarbon solvents
Shippable heat-treatable sputter coated article and method of making same
Automatic ion concentration analyzing apparatus
Method of forming a fiber preform with dopants dissolved in a liquid
Epitaxial facility
Stretch wrap films