Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for inspecting defects










Image Number 10 for United States Patent #8121398.

A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.








 
 
  Recently Added Patents
Electrode composition with enhanced performance characteristics
Method for manufacturing light emitting diodes
Compositions for inhibiting NADPH oxidase activity
Nonvolatile memory device
Rewarding independent influencers
Semiconductor devices having through electrodes and methods of fabricating the same
Buildable dinnerware
  Randomly Featured Patents
Permanent magnet coupling and transmission
Device used in image scanner for quickly and precisely determining scan start point and improving scanning quality
Connecting arrangement with a threaded sleeve
Methods and apparatus for controlling the temperatures of a plurality of rooms
1-(2,6-Dichlorobenzoyl)-3-(4-trifluoromethyl-2-thiazolyl)urea and use as insecticide
5-fluoro-2-oxopyrimidine-1(2H)-carboxylate derivatives
Intra-ocular implant lens
Suspended loop ammunition magazine
Roll pack
Zinc magnesium titanates, processes for preparing thereof and thermoregulating functional compositions containing the same