Resources Contact Us Home
Method and apparatus for inspecting defects

Image Number 10 for United States Patent #8121398.

A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.

  Recently Added Patents
Switching power supply apparatus with overcurrent limiting and prolonged holding time
Semiconductor process
Chemically resistant membranes, coatings and films and methods for their preparation
Optical fixing device and image forming apparatus
Sample chamber for laser ablation inductively coupled plasma mass spectroscopy
Cleaning device, and image forming apparatus, process cartridge, and intermediate transfer unit each including the cleaning device
Image forming apparatus
  Randomly Featured Patents
Fixing device, image forming apparatus including the fixing device, and fixing method
Combined radio receiver and clock
Rapid efficacy assessment method for lung cancer therapy
Device for filling a plurality of containers
Speaker for digital media player
Optical channel tap assembly
Monoaxially-oriented and annealed films with high cross machine toughness and related process
Using a laser beam to indicate roller wear
Organic electroluminescence display device and fabricating method of the same
User dynamically definable centralized notification between portable devices