Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Coupling apparatus, exposure apparatus, and device fabricating method










Image Number 16 for United States Patent #8120751.

An exposure apparatus fills a space between a projection optical system and a substrate with a liquid and projects a pattern image onto the substrate to expose the substrate. The projection optical system has a first group including an optical member that comes into contact with the liquid, and a second group that differs from the first group. The first group is supported by a first support member via a vibration isolating apparatus.








 
 
  Recently Added Patents
Use of endogenous promoters in genetic engineering of Nannochloropsis gaditana
Audio and music data transmission medium and transmission protocol
Method and structure for image local contrast enhancement
Case for electronic device
Electronic device, communication control method of electronic device, and information terminal device
Modified and stabilized GDF propeptides and uses thereof
Expression of dirigent gene EG261 and its orthologs and paralogs enhances pathogen resistance in plants
  Randomly Featured Patents
Long-wavelength infra-red night vision goggles
Method and apparatus for subsampling phase spectrum information
Rotor of a turbogenerator having direct gas cooling of the excitation winding
Cleaning composition comprising a ternary surfactant system in combination with dipropyl or diisopropyl adipate solvent
Snap on card straightener
Screening G protein-coupled receptor antagonists for methods of treating Alzheimer's disease
Continuous casting nozzle
Glass fiber containing polymer sheet and process for preparing same
Pixel circuit, display unit, and pixel circuit drive method
Method for inhibiting the corrosion-causing tendency and coloration of halogen-containing olefin resin blends