Resources Contact Us Home
Coupling apparatus, exposure apparatus, and device fabricating method

Image Number 16 for United States Patent #8120751.

An exposure apparatus fills a space between a projection optical system and a substrate with a liquid and projects a pattern image onto the substrate to expose the substrate. The projection optical system has a first group including an optical member that comes into contact with the liquid, and a second group that differs from the first group. The first group is supported by a first support member via a vibration isolating apparatus.

  Recently Added Patents
Moving picture decoding device and moving picture decoding method
Systems and methods for managing policies on a computer
Low drop-out regulator providing constant current and maximum voltage limit
Wireless monitoring in process applications
Strongly bound carbon nanotube arrays directly grown on substrates and methods for production thereof
Secure device sharing
Method and system for leveraging the power of one's social-network in an online marketplace
  Randomly Featured Patents
Liquid substances freeze-drying systems and methods
Fastenable docking device with fastening device
Vehicle anti-skid braking systems
Method for removing air bubbles or solid impurities from the printing head of a drop-on-demand type ink jet printer
Method and apparatus for polishing semiconductor substrate
Methods of terminating and connectorizing cables
Method for manufacturing SOI wafer
Shaped woven tubular soft-tissue prostheses and method of manufacturing the same
Screen printing machine
Isotopic composition analyzer