Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Coupling apparatus, exposure apparatus, and device fabricating method










Image Number 16 for United States Patent #8120751.

An exposure apparatus fills a space between a projection optical system and a substrate with a liquid and projects a pattern image onto the substrate to expose the substrate. The projection optical system has a first group including an optical member that comes into contact with the liquid, and a second group that differs from the first group. The first group is supported by a first support member via a vibration isolating apparatus.








 
 
  Recently Added Patents
Communication device and two-dimensional communication system using the same
Transfer formulas
Method and device for managing a turning setpoint applied to at least one turning actuator for the rear wheels of an automobile
Mechanism for visible users and groups
Multiple-frequency inversion method and control apparatus for internal combustion engine driven generator
High pressure refolding of protein aggregates and inclusion bodies
Dynamic rebasing of persisted time information
  Randomly Featured Patents
Power circuit applying AC voltage and DC voltage to respective terminals of a capacitor, for outputting AC voltage shifted in accordance with the DC voltage
Method and device for feeding components for bone cement into a mixing vessel for these
Identification card
Surgical fixation system and method
Priming and starting apparatus for engines
Semiconductor device and method of manufacturing the same
Systems and methods for dispensing and collecting data related to controlled substances
Base and electrical outlet having an expandable base mounting aperture and method for making same
Resolution conversion method of pictorial image processing system
Speech enabling labeless controls in an existing graphical user interface