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Coupling apparatus, exposure apparatus, and device fabricating method










Image Number 16 for United States Patent #8120751.

An exposure apparatus fills a space between a projection optical system and a substrate with a liquid and projects a pattern image onto the substrate to expose the substrate. The projection optical system has a first group including an optical member that comes into contact with the liquid, and a second group that differs from the first group. The first group is supported by a first support member via a vibration isolating apparatus.








 
 
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