Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Coupling apparatus, exposure apparatus, and device fabricating method










Image Number 16 for United States Patent #8120751.

An exposure apparatus fills a space between a projection optical system and a substrate with a liquid and projects a pattern image onto the substrate to expose the substrate. The projection optical system has a first group including an optical member that comes into contact with the liquid, and a second group that differs from the first group. The first group is supported by a first support member via a vibration isolating apparatus.








 
 
  Recently Added Patents
Method for decoding a spatially multiplexed data signal using a maximum likelihood detection
Virtual image display device and manufacturing method of virtual image display device
Method and apparatus for soft information transfer between constituent processor circuits in a soft-value processing apparatus
Method of preparing enteric hard capsule and enteric hard capsule prepared thereby
Network-based dynamic encoding
Bio-pesticide and method for pest control
Crystalline form of zofenopril calcium
  Randomly Featured Patents
Polymer-derived lubricant additive for ultra-low wear applications
Developer mix monitoring for replaceable developer stations
Spring manufacturing apparatus
Pipe supporting devices
Laser irradiation apparatus
Semiconductor device and method of manufacturing the same
Device for preparation of water-fuel emulsion
Method and apparatus for generating high resolution vidicon camera images
Sheet for vehicle seats
Automatic control device for indirect fired water heaters and heat exchangers