Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Coupling apparatus, exposure apparatus, and device fabricating method










Image Number 16 for United States Patent #8120751.

An exposure apparatus fills a space between a projection optical system and a substrate with a liquid and projects a pattern image onto the substrate to expose the substrate. The projection optical system has a first group including an optical member that comes into contact with the liquid, and a second group that differs from the first group. The first group is supported by a first support member via a vibration isolating apparatus.








 
 
  Recently Added Patents
Visual universal decryption apparatus and methods
Audio signal clip detection
Storage basket with lid
Inductive antenna coupling
Apparatus and method for transmitting and receiving data streams in wireless system
Display apparatus
Dynamic data caches, decoders and decoding methods
  Randomly Featured Patents
Carbon monoxide hydrogenation process
Snack display
Process and apparatus for regenerating wet glycols
Method for driving a satellite offset press and satellite offset press
Wavy lamp
Jewelry finding
Method to obtain in the hot state single round bars from hot single multiple elements, and relative device
Apparatus and method for FNR calibration and testing neutral safety switch thresholds in an agricultural windrower
Test fixture for printed circuit board assembly
Phosphonium salts and processes for production of and uses for the same, and phosphines deriving the same and processes for production of the phosphines