Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Coupling apparatus, exposure apparatus, and device fabricating method










Image Number 16 for United States Patent #8120751.

An exposure apparatus fills a space between a projection optical system and a substrate with a liquid and projects a pattern image onto the substrate to expose the substrate. The projection optical system has a first group including an optical member that comes into contact with the liquid, and a second group that differs from the first group. The first group is supported by a first support member via a vibration isolating apparatus.








 
 
  Recently Added Patents
Die packages and systems having the die packages
Modular microscope construction
Magnifying glass
Low-coupling oxide media (LCOM)
Laser protection polymeric materials
Integrated circuit packaging system with interconnects and method of manufacture thereof
Device and method incorporating an improved text input mechanism
  Randomly Featured Patents
Clamping chuck
Image pickup apparatus employing separate first and second battery storage areas
Apparatus and method to visually indicate the status of a data storage device
Detergent composition with fabric softening properties
Apparatus and method for forming features on a substrate
Dithiocarbamate compounds
Gasoline station emissions control
Fraud detection in postage meter having unsecured print wheels
Combined coffee maker and cup
Projection optical system, exposure apparatus and method using the same