Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Air gap interconnect structures and methods for forming the same










Image Number 11 for United States Patent #8120179.

A metal interconnect structure includes at least a pair of metal lines, a cavity therebetween, and a dielectric metal-diffusion barrier layer located on at least one portion of walls of the cavity. After formation of a cavity between the pair of metal lines, the dielectric metal-diffusion barrier layer is formed on the exposed surfaces of the cavity. A dielectric material layer is formed above the pair of metal lines to encapsulate the cavity. The dielectric metal-diffusion barrier layer prevents diffusion of metal and impurities from one metal line to another metal line and vice versa, thereby preventing electrical shorts between the pair of metal lines.








 
 
  Recently Added Patents
Processing color and panchromatic pixels
Voltage detector having voltage detection printed board
Display screen of a mobile terminal or portion thereof with a graphical user interface
Multistable electromagnetic actuators
Silicon-on-insulator (SOI) structure configured for reduced harmonics and method of forming the structure
Fabric care compositions comprising front-end stability agents
System and method for providing an extended platform for an operating system
  Randomly Featured Patents
Method of identifying an extreme interaction pitch region, methods of designing mask patterns and manufacturing masks, device manufacturing methods and computer programs
Corrugator
Ultrasonic flaw detector and ultrasonic flaw detection method
Apparatus for assembling threaded base to a projectile
Device for stabilizing the needle thread loop in sewing machines
Process for the purification of NF.sub.3
Infant sleeping apparatus and child containment system
Method of and apparatus for producing images for stereoscopic viewing of annihilation radiation sources
Chemical milling
Automated and semiautomated printmask generation for incremental printing