Resources Contact Us Home
Method of manufacturing a semiconductor device having an active region and dummy patterns

Image Number 15 for United States Patent #8119495.

There is provided a technique for improving the flatness at the surface of members embedded in a plurality of recesses without resulting in an increase in the time required for the manufacturing processes. According to this technique, the dummy patterns can be placed up to the area near the boundary BL between the element forming region DA and dummy region FA by placing the first dummy pattern DP.sub.1 of relatively wider area and the second dummy pattern DP.sub.2 of relatively small area in the dummy region FA. Thereby, the flatness of the surface of the silicon oxide film embedded within the isolation groove can be improved over the entire part of the dummy region FA. Moreover, an increase of the mask data can be controlled when the first dummy patterns DP.sub.1 occupy a relatively wide region among the dummy region FA.

  Recently Added Patents
Method and apparatus for validating commands for VOIP network components
Method, apparatus and system for registering in universal service interface system
Flip chip bump structure and fabrication method
Video processing device and method of video processing
Multi-channel surface plasmon resonance sensor using beam profile ellipsometry
Strawberry plant named `Mayflower`
Pulse modulated RF power control method and pulse modulated RF power supply device
  Randomly Featured Patents
Method and apparatus for control of a transmission torque converter clutch
Thin film magnetic memory device including memory cells having a magnetic tunnel junction
Pressure mediated diesel engine exhaust gas recirculation control system
Systems and methods for peritoneal dialysis
Illuminating apparatus for a microscope
Drill and surface insensitive starting drill for difficult materials and deep holes
Using hyperbolic trees to visualize data generated by patent-centric and group-oriented data processing
Magnetoresistive head with hard magnetic bias
Pedal for drum
Constant velocity ratio universal joints