Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing a semiconductor device having an active region and dummy patterns










Image Number 15 for United States Patent #8119495.

There is provided a technique for improving the flatness at the surface of members embedded in a plurality of recesses without resulting in an increase in the time required for the manufacturing processes. According to this technique, the dummy patterns can be placed up to the area near the boundary BL between the element forming region DA and dummy region FA by placing the first dummy pattern DP.sub.1 of relatively wider area and the second dummy pattern DP.sub.2 of relatively small area in the dummy region FA. Thereby, the flatness of the surface of the silicon oxide film embedded within the isolation groove can be improved over the entire part of the dummy region FA. Moreover, an increase of the mask data can be controlled when the first dummy patterns DP.sub.1 occupy a relatively wide region among the dummy region FA.








 
 
  Recently Added Patents
Power collecting device, power measuring device, and power collecting method
Cycloalkylamine substituted isoquinoline derivatives
Solid-state image pickup element, method of manufacturing the same, and image pickup apparatus including the same
Hydrogen generation device and fuel cell system
Avoiding conflict in update in distributed environment employing multiple clients
Generating agricultural information products using remote sensing
Pickup device and method for manufacturing the same
  Randomly Featured Patents
Driver circuits for dot matrix display apparatus
Locomotion assisting device and method
Impregnation process and device for monitoring the impregnation of a carrier material
Spoiler
Biodegradable absorbents and methods of preparation
Transferring data in virtual tape server, involves determining availability of small chain of data, if large chain is not available while transferring data to physical volumes in peak mode
System for replacing a portion of an image data stream in an ink jet printer
Modification of resins with isocyanatosiloxanes
Multiple biopsy apparatus and related method of use
Working tool