Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method










Image Number 6 for United States Patent #8119196.

A semiconductor manufacturing apparatus comprises a discharge portion discharging a coating liquid onto a substrate; a gas supply tube supplying an inert gas into a liquid container that contains the coating liquid, and pressurizing an interior of the liquid container; a coating liquid supply tube airtightly supplying the coating liquid from the liquid container to the discharge portion using pressurization from the gas supply tube; a first connecting portion capable of attaching and detaching the liquid container to and from the coating liquid supply tube; a second connecting portion capable of attaching and detaching the liquid container to and from the gas supply tube; and a solvent supply tube supplying a solvent, which can dissolve the coating liquid, to the first connecting portion.








 
 
  Recently Added Patents
Combining seismic data from sensors to attenuate noise
Active constant power supply apparatus
Method and system for providing magnetic junctions having improved characteristics
Method and laser receiver for acoustically indicating a laser beam
Digital photographing apparatus, method of controlling the same, and recording medium for the method
Intake parameter-calculating device for internal combustion engine and method of calculating intake parameter
Image scanning apparatus and image forming apparatus
  Randomly Featured Patents
Method and apparatus for controlling the decarburization of steel components in a furnace
Magnetoresistive sensor with magnetostatic coupling of magnetic regions
Stabilizing arrangement
CVD codeposition of A1 and one or more reactive (gettering) elements to form protective aluminide coating
Revolving cable-to-housing connection
Fabric from impregnated polyphenylene sulfide fibers
Method and system for fabricating liquid crystal cells
Silicon carbide substrate manufacturing method and silicon carbide substrate
Method and apparatus for synchronous clock distribution to a plurality of destinations
Method and apparatus for production of a cast component