Resources Contact Us Home
Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method

Image Number 6 for United States Patent #8119196.

A semiconductor manufacturing apparatus comprises a discharge portion discharging a coating liquid onto a substrate; a gas supply tube supplying an inert gas into a liquid container that contains the coating liquid, and pressurizing an interior of the liquid container; a coating liquid supply tube airtightly supplying the coating liquid from the liquid container to the discharge portion using pressurization from the gas supply tube; a first connecting portion capable of attaching and detaching the liquid container to and from the coating liquid supply tube; a second connecting portion capable of attaching and detaching the liquid container to and from the gas supply tube; and a solvent supply tube supplying a solvent, which can dissolve the coating liquid, to the first connecting portion.

  Recently Added Patents
Battery grid
Method and system for phase-sensitive magnetic resonance imaging
Soybean cultivar CL1013675
Managing a packet service call within mobile communications user equipment
Light emitting device and light emitting device package
Method for automatically estimating inertia in a mechanical system
Phase lock loop with injection pulse control
  Randomly Featured Patents
Apparatus for contacting running paper webs with dried steam
Methane conversion
Process for etching a conductive layer
Cable snake
Light emitting diode
Road surface friction and hill slope estimator
Device for fastening a cartridge case to a projectile
System for coupling the public telephone network to the internet
Chemically amplified positive resist composition
Module loading device