Resources Contact Us Home
Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method

Image Number 6 for United States Patent #8119196.

A semiconductor manufacturing apparatus comprises a discharge portion discharging a coating liquid onto a substrate; a gas supply tube supplying an inert gas into a liquid container that contains the coating liquid, and pressurizing an interior of the liquid container; a coating liquid supply tube airtightly supplying the coating liquid from the liquid container to the discharge portion using pressurization from the gas supply tube; a first connecting portion capable of attaching and detaching the liquid container to and from the coating liquid supply tube; a second connecting portion capable of attaching and detaching the liquid container to and from the gas supply tube; and a solvent supply tube supplying a solvent, which can dissolve the coating liquid, to the first connecting portion.

  Recently Added Patents
Multi-bank queuing architecture for higher bandwidth on-chip memory buffer
Magnetoresistive element and manufacturing method of the same
DMAPN having a low DGN content and a process for preparing DMAPA having a low DGN content
Apparatus and method for exerting force on a subject tissue
Protective vest
Handheld electronic device with text disambiguation employing advanced editing feature
System for determining movement properties of a guided vehicle
  Randomly Featured Patents
Semiconductor device having a memory cell with a plurality of active elements and at least one passive element
Method for eliminating inhibitors of polymerization of monomer mixtures using an optimized alumina
Nuclear reactors
Process for manufacturing a DRAM cell
Wafer level underfill and interconnect process
Low melting point Ni-Cr alloy for cast dental products
Method of preparing an animal model for interstitial pneumonia
Method, apparatus and system for a secure mobile IP-based roaming solution
Self-adjusting bearing
Method of manufacturing semiconductor device