Resources Contact Us Home
Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method

Image Number 6 for United States Patent #8119196.

A semiconductor manufacturing apparatus comprises a discharge portion discharging a coating liquid onto a substrate; a gas supply tube supplying an inert gas into a liquid container that contains the coating liquid, and pressurizing an interior of the liquid container; a coating liquid supply tube airtightly supplying the coating liquid from the liquid container to the discharge portion using pressurization from the gas supply tube; a first connecting portion capable of attaching and detaching the liquid container to and from the coating liquid supply tube; a second connecting portion capable of attaching and detaching the liquid container to and from the gas supply tube; and a solvent supply tube supplying a solvent, which can dissolve the coating liquid, to the first connecting portion.

  Recently Added Patents
360-degree angle decoder
High-frequency power amplifier
Sealing member for piezoelectric resonator device, and piezoelectric resonator device
Methods and devices for detecting and measuring environmental conditions in high performance device packages
PLL circuit
Jet pump and reactor
  Randomly Featured Patents
Combined data entry terminal and card reader
Internal heat exchanger
Process for expanding tobacco
Broadband spectroscopic rotating compensator ellipsometer
Brake lining monitoring device and method
Multiple lamp lighting level ballast for series connected lamps
Topical antimicrobial pharmaceutical compositions and methods
Device with novel and improved surface properties
Antenna for radio communications apparatus
Electrical outlet safety cover