Resources Contact Us Home
Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method

Image Number 6 for United States Patent #8119196.

A semiconductor manufacturing apparatus comprises a discharge portion discharging a coating liquid onto a substrate; a gas supply tube supplying an inert gas into a liquid container that contains the coating liquid, and pressurizing an interior of the liquid container; a coating liquid supply tube airtightly supplying the coating liquid from the liquid container to the discharge portion using pressurization from the gas supply tube; a first connecting portion capable of attaching and detaching the liquid container to and from the coating liquid supply tube; a second connecting portion capable of attaching and detaching the liquid container to and from the gas supply tube; and a solvent supply tube supplying a solvent, which can dissolve the coating liquid, to the first connecting portion.

  Recently Added Patents
Anti-FGFR3 antibodies and methods using same
Image sorting device, method, program, and integrated circuit and storage medium storing said program
Low-complexity motion vector prediction systems and methods
Load control device
Extract of Vanilla planifolia
Extreme ultraviolet light source device and method for generating extreme ultraviolet light
  Randomly Featured Patents
Method for purification of waste water
Drive for a variable-stroke swash plate mechanism
Fluoropolymer coating compositions
Inductive loop system for detection of an electrically conductive object
Method and apparatus for determining the heat transfer characteristics of a tube
Battery pack having protected terminals and connection mechanism
Method and system for configuring RAID subsystems with block I/O commands and block I/O path
Image display device
Two point hitch construction
Ball holder