Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method










Image Number 6 for United States Patent #8119196.

A semiconductor manufacturing apparatus comprises a discharge portion discharging a coating liquid onto a substrate; a gas supply tube supplying an inert gas into a liquid container that contains the coating liquid, and pressurizing an interior of the liquid container; a coating liquid supply tube airtightly supplying the coating liquid from the liquid container to the discharge portion using pressurization from the gas supply tube; a first connecting portion capable of attaching and detaching the liquid container to and from the coating liquid supply tube; a second connecting portion capable of attaching and detaching the liquid container to and from the gas supply tube; and a solvent supply tube supplying a solvent, which can dissolve the coating liquid, to the first connecting portion.








 
 
  Recently Added Patents
Article based on a composition containing a crosslinked blend of elastomers
Non-zero rounding and prediction mode selection techniques in video encoding
Image forming apparatus capable of timely starting different image formation mode
Intake parameter-calculating device for internal combustion engine and method of calculating intake parameter
User-initiated quality of service modification in a mobile device
Radiation-curable ink composition, ink jet recording method, and recorded matter
Thin film switch and press key/keyboard using the same
  Randomly Featured Patents
Integrated proxy interface for web based telecommunication toll-free network management using a network manager for downloading a call routing tree to client
Party needs memo holder
Process for stabilizing polyarylates with an aromatic phenol
Optical glucose sensor chip and method of manufacturing the same
Optically active carbacephems
Methods and systems for multiplication-free inter-layer image prediction
Interlocking roofing panel system
AFC wrap-around detection
Systems and methods for the selection and purchase of digital assets
Data restoring method and an apparatus using journal data and an identification information