Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method










Image Number 6 for United States Patent #8119196.

A semiconductor manufacturing apparatus comprises a discharge portion discharging a coating liquid onto a substrate; a gas supply tube supplying an inert gas into a liquid container that contains the coating liquid, and pressurizing an interior of the liquid container; a coating liquid supply tube airtightly supplying the coating liquid from the liquid container to the discharge portion using pressurization from the gas supply tube; a first connecting portion capable of attaching and detaching the liquid container to and from the coating liquid supply tube; a second connecting portion capable of attaching and detaching the liquid container to and from the gas supply tube; and a solvent supply tube supplying a solvent, which can dissolve the coating liquid, to the first connecting portion.








 
 
  Recently Added Patents
Catalysts and process for producing aldehydes
Facility to reuse paper
Towel clip
Method of treating lung cancer
Method for spore detection
Biological analysis arrangement and approach therefor
Formwork release composition and use thereof
  Randomly Featured Patents
Heat hardenable coating composition based on polyurethane urea and coated substrate prepared therefrom
Iron-type golf clubs
Chewing gum containing flavor composition and flavor composition therefor
Complement receptor 1 and 2 fusion proteins
Determining which user files to backup in a backup system
Process for polymerizing conjugated dienes
Short circuit protection arrangement for an output buffer of an integrated circuit
Measuring electrode, especially glass electrode
Apparatus for sealing a ball grid array package and circuit card interconnection
Canister