Resources Contact Us Home
Clamping mechanism for semiconductor device

Image Number 2 for United States Patent #8118940.

A clamping mechanism for a semiconductor substrate includes: a C-shaped pickup plate; a susceptor top plate having a periphery adapted to receive and support an inner periphery portion of the C-shaped pickup plate thereon; and a clamp comprising (i) a top ring portion for clamping the substrate by sandwiching a periphery of the substrate between the top ring portion and the susceptor top plate and (ii) a pickup plate supporting portion adapted to support an outer periphery portion of the C-shaped pickup plate, wherein the C-shaped pickup plate is movable between the top ring portion and the pickup plate supporting portion, and the clamp is movable upward together with the C-shaped pickup plate and the susceptor top plate.

  Recently Added Patents
System and method for outputting virtual textures in electronic devices
Tranverse in-core probe monitoring and calibration device for nuclear power plants, and method thereof
Non-aqueous electrolyte battery
Image forming apparatus and system connectable with an authorization apparatus via a communications network, the image forming apparatus comprising an apparatus control section, an initial inq
Scoring users of network based users
Stable light source device
System of providing an internet web site that assists medical professionals draft a letter of medical necessity or other documentation for transmission to a third party payer on behalf of a pa
  Randomly Featured Patents
Refrigeration equipment service apparatus with quick-disconnect couplings
Light-emitting device, and lens used in the same
Method of renewing reference pattern stored in dictionary
Fold-up scaffold for semi-trailer shop
Sensor and control module with improved sensor isolation
Weedless fish hook
Elastically stretchable nonwoven fabric and process for making the same
Method of producing spray deposit on bearing boss
In situ method and apparatus for inspecting and repairing subsea wellheads
Cooking apparatus, cooking system, and cooking control method utilizing bar code