Resources Contact Us Home
Mixing box, and apparatus and method for producing films

Image Number 4 for United States Patent #8118935.

A thin film manufacturing system, wherein a stage for placing a substrate thereon is disposed within a vacuum reactor and a gas head for supplying a film forming gas to a central area on a top face of the vacuum reactor is arranged so that the gas head is opposed to the stage. A cylindrical sleeve member is disposed and comes in close contact with a side wall of the stage to surround a periphery of the stage. The height of the stage can be established at the position where the volume of a second space formed below the stage and connected to a vacuum discharge means is larger than that of a first space formed above the stage, in such a manner that an exhaust gas is isotropically discharged from the first space without causing any convection current therein through the interstice between the sleeve member and an inner wall surface constituting the reactor.

  Recently Added Patents
High porosity ceramic honeycomb article containing rare earth oxide and method of manufacturing same
Isothermal amplification of DNA
Touch screen tablet
Liquid-filled protein-phosphatidic acid capsule dispersions
Method and apparatus for band switching in wireless local access network
Double diffused metal oxide semiconductor device and manufacturing method thereof
Communication apparatus and communication system
  Randomly Featured Patents
Wand massager
Sliding rack-mountable shelf for rack-mountable components
Method of forming discrete solder portions on respective contact pads of a printed circuit board
Incubator for infants
System and method for enhancing human communications
Stackable container assembly with reciprocal locking of the stacked containers
Semiconductor device inspecting apparatus
Three-dimensional time-of-flight gamma camera system
Intermediate memory system for connecting microcomputers to a rotating disk memory
System and method for cleaning noisy genetic data and determining chromosome copy number