Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Mixing box, and apparatus and method for producing films










Image Number 4 for United States Patent #8118935.

A thin film manufacturing system, wherein a stage for placing a substrate thereon is disposed within a vacuum reactor and a gas head for supplying a film forming gas to a central area on a top face of the vacuum reactor is arranged so that the gas head is opposed to the stage. A cylindrical sleeve member is disposed and comes in close contact with a side wall of the stage to surround a periphery of the stage. The height of the stage can be established at the position where the volume of a second space formed below the stage and connected to a vacuum discharge means is larger than that of a first space formed above the stage, in such a manner that an exhaust gas is isotropically discharged from the first space without causing any convection current therein through the interstice between the sleeve member and an inner wall surface constituting the reactor.








 
 
  Recently Added Patents
Boring machine
Wireless communication apparatus, a method of wireless communication, and a program for wireless communication
Multi-protocol data transfers
Asynchronous loading of scripts in web pages
Vacuum cleaner
Dye-sensitized solar cell, dye-sensitized solar cell module, and coating liquid for forming electrolyte layer
High-frequency power amplifier
  Randomly Featured Patents
Versatile filter based spectrophotometer
Assembly procedure for CIC with floating components
Single high dose fluoroquinolone treatment
Flexible coupling with quick-disconnect coupling hubs
Sign with collapsible, fanning framework
Scooter stand
Adjustable end wrench
High thermal conductivity dielectric tape
Semiconductor device package structure
Variable rate spray nozzle control