Resources Contact Us Home
Mixing box, and apparatus and method for producing films

Image Number 4 for United States Patent #8118935.

A thin film manufacturing system, wherein a stage for placing a substrate thereon is disposed within a vacuum reactor and a gas head for supplying a film forming gas to a central area on a top face of the vacuum reactor is arranged so that the gas head is opposed to the stage. A cylindrical sleeve member is disposed and comes in close contact with a side wall of the stage to surround a periphery of the stage. The height of the stage can be established at the position where the volume of a second space formed below the stage and connected to a vacuum discharge means is larger than that of a first space formed above the stage, in such a manner that an exhaust gas is isotropically discharged from the first space without causing any convection current therein through the interstice between the sleeve member and an inner wall surface constituting the reactor.

  Recently Added Patents
Cytokine receptors associated with myelogenous haematological proliferative disorders and uses thereof
Image processing device, image processing method, and program
Washing-up bowl
Gangable electrical box and leveling assembly
Trash bag retention device
Stroboscopic image modulation to reduce the visual blur of an object being viewed by an observer experiencing vibration
Mobile tablet information handling system support
  Randomly Featured Patents
Lamps and lamp holders in display lighting
Liquid crystal display panel, liquid crystal display device, photo detecting device and light intensity adjustment method
Disposable chemical container
Optical sources having a strongly scattering gain medium providing laser-like action
Visual display with magnetic overlay
Method for producing a tobacco rod with a hollow passageway extending therethrough
Compositions for topical application of therapeutic agents
Method and apparatus for manufacturing heater roller
Integrated circuit with a MOS structure having reduced parasitic bipolar transistor action
Hot spot analysis of IMS databases