Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Mixing box, and apparatus and method for producing films










Image Number 4 for United States Patent #8118935.

A thin film manufacturing system, wherein a stage for placing a substrate thereon is disposed within a vacuum reactor and a gas head for supplying a film forming gas to a central area on a top face of the vacuum reactor is arranged so that the gas head is opposed to the stage. A cylindrical sleeve member is disposed and comes in close contact with a side wall of the stage to surround a periphery of the stage. The height of the stage can be established at the position where the volume of a second space formed below the stage and connected to a vacuum discharge means is larger than that of a first space formed above the stage, in such a manner that an exhaust gas is isotropically discharged from the first space without causing any convection current therein through the interstice between the sleeve member and an inner wall surface constituting the reactor.








 
 
  Recently Added Patents
Authentication method
Compact light shield for flash photography
Self-assembling surface coating
System for targeted delivery of therapeutic agents
Chemical method of making a suspension, emulsion or dispersion of pyrithione particles
Display apparatus, control method thereof, and program
Methods and apparatus for voltage selection for a MOSFET switch device
  Randomly Featured Patents
Substrate anchor structure and method
Integrated circuit encapsulation system with vent
Golf club having removable head
Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography
Intermediate transfer apparatus
Fire alarm
Resectoscope
Tubular fishing rod with integral handle-reel seat
Kite with an improved rudder
Apparatus and method for supplying paper in printer