Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Mixing box, and apparatus and method for producing films










Image Number 4 for United States Patent #8118935.

A thin film manufacturing system, wherein a stage for placing a substrate thereon is disposed within a vacuum reactor and a gas head for supplying a film forming gas to a central area on a top face of the vacuum reactor is arranged so that the gas head is opposed to the stage. A cylindrical sleeve member is disposed and comes in close contact with a side wall of the stage to surround a periphery of the stage. The height of the stage can be established at the position where the volume of a second space formed below the stage and connected to a vacuum discharge means is larger than that of a first space formed above the stage, in such a manner that an exhaust gas is isotropically discharged from the first space without causing any convection current therein through the interstice between the sleeve member and an inner wall surface constituting the reactor.








 
 
  Recently Added Patents
Digital photographing apparatus
Supporting multiple channels of a single interface
People engine optimization
System and method for advertising messages on distributed document processing devices
Methods for the production of aligned carbon nanotubes and nanostructured material containing the same
Antisense modulation of C-reactive protein expression
Isolated nucleic acid molecule encoding an antibody that reduces GDF-8 activity
  Randomly Featured Patents
Disposable probe tip
Slurry-phase skeletal iron catalyst process for synthesis gas conversion to hydrocarbons
Method of repairing porous ceramic bodies and ceramic composition for same
Infusion apparatus with constant force spring energy source
Damascene double-gate MOSFET structure and its fabrication method
Glass shade
Method for fabricating group III-V compound semiconductor substrate
Wheel alignment apparatus
Plug-in power supply adapter with components in the strain relief member
Differential amplifier feedback current mirror