Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Mixing box, and apparatus and method for producing films










Image Number 4 for United States Patent #8118935.

A thin film manufacturing system, wherein a stage for placing a substrate thereon is disposed within a vacuum reactor and a gas head for supplying a film forming gas to a central area on a top face of the vacuum reactor is arranged so that the gas head is opposed to the stage. A cylindrical sleeve member is disposed and comes in close contact with a side wall of the stage to surround a periphery of the stage. The height of the stage can be established at the position where the volume of a second space formed below the stage and connected to a vacuum discharge means is larger than that of a first space formed above the stage, in such a manner that an exhaust gas is isotropically discharged from the first space without causing any convection current therein through the interstice between the sleeve member and an inner wall surface constituting the reactor.








 
 
  Recently Added Patents
Solar power system with communication network utilizing magnetic fields
HSP20 inhibits amyloidogenesis and neurotoxicity
Pizza stone
Facility to reuse paper
Method and apparatus for organizing segments of media assets and determining relevance of segments to a query
Incentive based recommendation method for mobile station content
Uplink interference mitigation method and apparatus
  Randomly Featured Patents
Transformer-rectifier with ripple filter
Bag computer system and bag apparatus
Techniques for tracking destinations on a mobile computing device
Bath with a vertically movable seat
Rehabilitation walker
Apparaus of making a flower pot or flower pot cover with controlled pleats
Planar motor with linear coil arrays
Endoscope and endoscopic instrument system having reduced backlash when moving the endoscopic instrument within a working channel of the endoscope
Data streaming mechanism in a microprocessor
Gaming terminal