Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Mixing box, and apparatus and method for producing films










Image Number 4 for United States Patent #8118935.

A thin film manufacturing system, wherein a stage for placing a substrate thereon is disposed within a vacuum reactor and a gas head for supplying a film forming gas to a central area on a top face of the vacuum reactor is arranged so that the gas head is opposed to the stage. A cylindrical sleeve member is disposed and comes in close contact with a side wall of the stage to surround a periphery of the stage. The height of the stage can be established at the position where the volume of a second space formed below the stage and connected to a vacuum discharge means is larger than that of a first space formed above the stage, in such a manner that an exhaust gas is isotropically discharged from the first space without causing any convection current therein through the interstice between the sleeve member and an inner wall surface constituting the reactor.








 
 
  Recently Added Patents
High pressure refolding of protein aggregates and inclusion bodies
Field emission cathode structure
Liquid-filled protein-phosphatidic acid capsule dispersions
Event-triggered server-side macros
Clock generator circuit for a charge pump
Systems and methods for electronic verification of vehicle insurance coverage
Parallel power inverter motor drive system
  Randomly Featured Patents
Labelling device for compact discs
Linear motor having dual coil configuration
Mixing container
Test medium solution for detecting phosphorus segregates in metallic material
Spring actuated pool cue
A non-ionic dispersing agent
System and method for assuring proper pen loading
Elastic water-permeable concrete composition, formulation method therefor, elastic water-permeable concrete structure formed of the composition, and method for constructing the structure
Combined write assist and retain-till-accessed memory array bias
Image forming apparatus