Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus for an improved deposition shield in a plasma processing system










Image Number 10 for United States Patent #8117986.

The present invention presents an improved deposition shield for surrounding a process space in a plasma processing system, wherein the design and fabrication of the deposition shield advantageously provides for a clean processing plasma in the process space with substantially minimal erosion of the deposition shield.








 
 
  Recently Added Patents
Spread spectrum communication system and transmission power control method therefor
Dynamic data caches, decoders and decoding methods
Coordinated garbage collection for raid array of solid state disks
Integrated disk driving module including a stepping motor integrally formed with a base unit
Stack and folding-typed electrode assembly and method for preparation of the same
Asynchronous distributed de-duplication for replicated content addressable storage clusters
Feedback method and processing system for policy installation failures
  Randomly Featured Patents
Phthalazinone derivatives
Pillow travel tote
Support used in bioluminescent dosing of enzymes, substrates or enzymatic inhibitors
Capacitance weighing mat with substantially rigid separators
Article control system having coded magnetomechanical marker
Source for vapor-depositing manganese
Baby bumper pad
Catalytic reforming of alkyleneamines
Inbred corn line PHGW7
Cryptographically processing data based on a Cassels-Tate pairing