Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus for an improved deposition shield in a plasma processing system










Image Number 10 for United States Patent #8117986.

The present invention presents an improved deposition shield for surrounding a process space in a plasma processing system, wherein the design and fabrication of the deposition shield advantageously provides for a clean processing plasma in the process space with substantially minimal erosion of the deposition shield.








 
 
  Recently Added Patents
System and method for selecting a video encoding format based on feedback data
Apparatus and method for transmitting and receiving data
Selective facsimile denial
Printing apparatus and method of operation of a printing apparatus
System and method of error reporting in a video distribution network
Key management policies for cryptographic keys
Monitoring and correcting upstream packet loss
  Randomly Featured Patents
Method of preparing condensation polymers by emulsion polymerization
Power saving modes displaying apparatus and method
Catalytic cracking unit with internal gross cut separator and quench injector
Insulated flexible duct for aircraft applications
Method for manufacturing frictional locking rings for stepped motor vehicle transmission synchronizing mechanisms
Method of manufacturing commutators
Hydrogen implant for buffer zone of punch-through non EPI IGBT
Three-dimensional module comprised of layers containing IC chips with overlying interconnect layers
Process for removing alkali metal aluminum silicate scale deposits from surfaces of chemical process equipment
Method of fabricating a composite actuator arm assembly